SnAg $ {3.0}$ Cu ${0.5}$倒装芯片互连的电迁移特性

Chien-Chen Lee, Chang-Chun Lee, K. Chiang
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引用次数: 7

摘要

电迁移是微电子互连的可靠性问题,特别是对于应用高电流密度的倒装芯片焊点。本研究表明,在倒装焊点的线凸几何结构下,Al迹与凸点之间的电流密度变化明显,电流拥挤效应使两者之间产生更多的热量。这种在高电流密度下的大焦耳加热可以增强锡原子在钎料凸起电流入口的迁移,并在入口处形成空洞。本研究发现在凸点的阴极/芯片侧存在两种电迁移失效模式:薄饼型和棉花型空洞。实验结果表明,极性和倾斜是影响SnAg3.0Cu0.5焊点电迁移行为的关键因素。因此,本研究设计了三维数值模型和相应的试验车辆来验证数值结果。通过有限元方法模拟了最大电流密度,以便更好地理解局部热和电流拥挤。研究发现,电流拥挤比线性减小,而孔隙形成增加。此外,还得出金属间化合物(IMC)层的生长与阳极/衬底侧施加电流密度之间存在线性关系的结论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electromigration Characteristic of SnAg $_{3.0}$ Cu $_{0.5}$ Flip Chip Interconnection
Electromigration is a reliability concern of microelectronic interconnections, especially for flip chip solder bump with high current density applied. This study shows that with the line-to-bump geometry in a flip chip solder joint, the current density changes significantly between the Al trace and the bump, while the current crowding effect generates more heat between them. This large Joule heating under high current density can enhance the migration of Sn atoms at the current entrance of the solder bump, and cause the void formation at the entrance point. The present study finds two kinds of electromigration failure modes at the cathode/chip side of the solder bump: the pancake-type and the cotton-type void. The experimental finding shows that the effects of polarity and tilting are key factors to observe in the electromigration behavior of SnAg3.0Cu0.5 solder bumps. Consequently, this study has designed a 3-D numerical model and a corresponding test vehicle to verify the numerical finding. The maximum current density is simulated through the finite element method to provide a better understanding of local heat and current crowding. This study finds that the current crowding ratio is reduced linearly while the void formation is increased. Furthermore, it is concluded that there is a linear relationship between the growth of the intermetallic compound (IMC) layer and the applied current density at the anode/substrate side.
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来源期刊
IEEE Transactions on Advanced Packaging
IEEE Transactions on Advanced Packaging 工程技术-材料科学:综合
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