以高k HfLaO栅极介质作为神经调节剂的室温处理突触a-IGZO TFT

IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
An Huang, Yuanxiao Ma, Jia Cheng Li, De Dai, Hui Xia Yang, Zi Chun Liu, De Cheng Zhang, Han Yang, Yuan Huang, Yi Yun Zhang, Xiao Ran Li, Ye Liang Wang, Pui To Lai
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引用次数: 0

摘要

在这项工作中,制备了室温加工的非晶InGaZnO (a-IGZO)薄膜晶体管(TFTs),高k HfLaO作为突触器件的栅极介质。通过共溅射提高a- igzo薄膜中的铟含量,并在Ar等离子体中处理HfLaO栅极电介质,得到In1.0Ga3.0Zn0.4O2.1的TFT具有优异的电学特性:具有45.8 cm2 V−1·s−1的高载流子迁移率、1.93 V的小阈值电压、- 0.015 V的小迟滞和0.21 V dec−1的小阈值摆幅(SS)。虽然增加了In1.0Ga3.0Zn0.4O2.1 TFT中的氧空位以获得较高的载流子迁移率,但在零栅极偏压下,由于氧空位的占据状态,几乎观察不到忆阻行为。在2 V的漏极尖峰电压和1 V的小栅极偏压下,由于氧离子的迁移和In1.0Ga3.0Zn0.4O2.1薄膜中氧空位的排空/脱陷,实现了各种电导调制和突触可塑性,从而通过利用TFT的天然三端结构实现了神经递质和神经调节剂的并行模拟。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Room-temperature-processed synaptic a-IGZO TFT with high-k HfLaO gate dielectric as neuromodulator
In this work, room-temperature-processed amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) have been fabricated with high-k HfLaO as gate dielectric for synaptic devices. By raising the indium content in the a-IGZO film via co-sputtering and treating the HfLaO gate dielectric in an Ar plasma, the TFT with In1.0Ga3.0Zn0.4O2.1 presents excellent electrical characteristics: a high intrinsic carrier mobility of 45.8 cm2 V−1·s−1, a small threshold voltage of 1.93 V, a small hysteresis of −0.015 V, and a small subthreshold swing (SS) of 0.21 V dec−1. Although the oxygen vacancies in the In1.0Ga3.0Zn0.4O2.1 TFT are increased to produce a high carrier mobility, memristive behaviors are hardly observed under zero gate bias due to their occupied states. Various conductance modulations and synaptic plasticities are achieved under a 2-V drain spiking voltage and a small gate bias of 1 V due to migration of oxygen ions and emptying/detrapping of oxygen vacancies in the In1.0Ga3.0Zn0.4O2.1 film, resulting in a concurrent emulation of neurotransmitter and neuromodulator through exploiting the native three-terminal structure of the TFT.
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来源期刊
Semiconductor Science and Technology
Semiconductor Science and Technology 工程技术-材料科学:综合
CiteScore
4.30
自引率
5.30%
发文量
216
审稿时长
2.4 months
期刊介绍: Devoted to semiconductor research, Semiconductor Science and Technology''s multidisciplinary approach reflects the far-reaching nature of this topic. The scope of the journal covers fundamental and applied experimental and theoretical studies of the properties of non-organic, organic and oxide semiconductors, their interfaces and devices, including: fundamental properties materials and nanostructures devices and applications fabrication and processing new analytical techniques simulation emerging fields: materials and devices for quantum technologies hybrid structures and devices 2D and topological materials metamaterials semiconductors for energy flexible electronics.
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