Jawad Hadid , Matias Rodrigues , Abdelmounaim Harouri , Christophe Dupuis , David Bouville , Antoine Martin , Martin Loidl , Laurence Ferlazzo
{"title":"低温探测器用可拆卸三层Au吸收体微加工","authors":"Jawad Hadid , Matias Rodrigues , Abdelmounaim Harouri , Christophe Dupuis , David Bouville , Antoine Martin , Martin Loidl , Laurence Ferlazzo","doi":"10.1016/j.mne.2023.100220","DOIUrl":null,"url":null,"abstract":"<div><p>Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to consider the source quality to mitigate spectral distortion due to the self-absorption of particle energy in the source deposited.</p><p>This work aimed to produce a replaceable 4π 3-layer gold absorber for DES in reusable metallic magnetic calorimeters, a class of LTDs. We present a novel 3-layer microfabrication process for a 1 mm diameter absorber with a total gold thickness ranging from 20 μm to 120 μm depending on the measured radionuclide (<sup>55</sup>Fe or <sup>241</sup>Am). The absorber integrates a gold nanofoam in which the radionuclide is deposited by nanodrop deposition of a few tenths of μL of a radioactive solution. We fabricated a high quality gold nanofoam layer with controllable porosity through a dealloying process using wet etching and integrating it on a thick electrodeposited gold layer. The fine study of the nanofoam microfabrication is performed using high-resolution scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX).</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"20 ","pages":"Article 100220"},"PeriodicalIF":2.8000,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Detachable three-layer Au absorber microfabrication for low-temperature detectors\",\"authors\":\"Jawad Hadid , Matias Rodrigues , Abdelmounaim Harouri , Christophe Dupuis , David Bouville , Antoine Martin , Martin Loidl , Laurence Ferlazzo\",\"doi\":\"10.1016/j.mne.2023.100220\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to consider the source quality to mitigate spectral distortion due to the self-absorption of particle energy in the source deposited.</p><p>This work aimed to produce a replaceable 4π 3-layer gold absorber for DES in reusable metallic magnetic calorimeters, a class of LTDs. We present a novel 3-layer microfabrication process for a 1 mm diameter absorber with a total gold thickness ranging from 20 μm to 120 μm depending on the measured radionuclide (<sup>55</sup>Fe or <sup>241</sup>Am). The absorber integrates a gold nanofoam in which the radionuclide is deposited by nanodrop deposition of a few tenths of μL of a radioactive solution. We fabricated a high quality gold nanofoam layer with controllable porosity through a dealloying process using wet etching and integrating it on a thick electrodeposited gold layer. The fine study of the nanofoam microfabrication is performed using high-resolution scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX).</p></div>\",\"PeriodicalId\":37111,\"journal\":{\"name\":\"Micro and Nano Engineering\",\"volume\":\"20 \",\"pages\":\"Article 100220\"},\"PeriodicalIF\":2.8000,\"publicationDate\":\"2023-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nano Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2590007223000503\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nano Engineering","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2590007223000503","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Detachable three-layer Au absorber microfabrication for low-temperature detectors
Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to consider the source quality to mitigate spectral distortion due to the self-absorption of particle energy in the source deposited.
This work aimed to produce a replaceable 4π 3-layer gold absorber for DES in reusable metallic magnetic calorimeters, a class of LTDs. We present a novel 3-layer microfabrication process for a 1 mm diameter absorber with a total gold thickness ranging from 20 μm to 120 μm depending on the measured radionuclide (55Fe or 241Am). The absorber integrates a gold nanofoam in which the radionuclide is deposited by nanodrop deposition of a few tenths of μL of a radioactive solution. We fabricated a high quality gold nanofoam layer with controllable porosity through a dealloying process using wet etching and integrating it on a thick electrodeposited gold layer. The fine study of the nanofoam microfabrication is performed using high-resolution scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX).