{"title":"扫描电子显微镜中电子剂量控制对聚合物的无损伤观察","authors":"Yoichiro Hashimoto;Kunji Shigeto;Ryo Komatsuzaki;Tsutomu Saito;Takashi Sekiguchi","doi":"10.1093/jmicro/dfab006","DOIUrl":null,"url":null,"abstract":"Methodology for quantitative evaluation of electron radiation damage and calculation of tolerable electron dose was developed to achieve damage-less scanning electron microscope (SEM) observation of beam-sensitive polymer film. The radiation damage is typically evaluated with visual impressions of SEM images; however, this method may be unreliable because observer's subjectivity may affect the results. Evaluation with quantitative value is crucial to improve reliability. In this study, the radiation damage was evaluated by using normalized correlative coefficient (R\n<inf>NCC</inf>\n) between an initial frame and latter frames of the multiple SEM images that were taken consecutively. Tolerable dose was obtained by defining a threshold point of R\n<inf>NCC</inf>\n where rapid reduction of R\n<inf>NCC</inf>\n started. A SEM image with less damage and acceptable signal-to-noise ratio was obtained by integrating the images from the initial frame to the tolerable frame.","PeriodicalId":18515,"journal":{"name":"Microscopy","volume":"70 4","pages":"375-381"},"PeriodicalIF":1.8000,"publicationDate":"2021-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1093/jmicro/dfab006","citationCount":"3","resultStr":"{\"title\":\"Damage-less observation of polymers by electron dose control in scanning electron microscope\",\"authors\":\"Yoichiro Hashimoto;Kunji Shigeto;Ryo Komatsuzaki;Tsutomu Saito;Takashi Sekiguchi\",\"doi\":\"10.1093/jmicro/dfab006\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Methodology for quantitative evaluation of electron radiation damage and calculation of tolerable electron dose was developed to achieve damage-less scanning electron microscope (SEM) observation of beam-sensitive polymer film. The radiation damage is typically evaluated with visual impressions of SEM images; however, this method may be unreliable because observer's subjectivity may affect the results. Evaluation with quantitative value is crucial to improve reliability. In this study, the radiation damage was evaluated by using normalized correlative coefficient (R\\n<inf>NCC</inf>\\n) between an initial frame and latter frames of the multiple SEM images that were taken consecutively. Tolerable dose was obtained by defining a threshold point of R\\n<inf>NCC</inf>\\n where rapid reduction of R\\n<inf>NCC</inf>\\n started. A SEM image with less damage and acceptable signal-to-noise ratio was obtained by integrating the images from the initial frame to the tolerable frame.\",\"PeriodicalId\":18515,\"journal\":{\"name\":\"Microscopy\",\"volume\":\"70 4\",\"pages\":\"375-381\"},\"PeriodicalIF\":1.8000,\"publicationDate\":\"2021-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1093/jmicro/dfab006\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microscopy\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/9579091/\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microscopy","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/9579091/","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Damage-less observation of polymers by electron dose control in scanning electron microscope
Methodology for quantitative evaluation of electron radiation damage and calculation of tolerable electron dose was developed to achieve damage-less scanning electron microscope (SEM) observation of beam-sensitive polymer film. The radiation damage is typically evaluated with visual impressions of SEM images; however, this method may be unreliable because observer's subjectivity may affect the results. Evaluation with quantitative value is crucial to improve reliability. In this study, the radiation damage was evaluated by using normalized correlative coefficient (R
NCC
) between an initial frame and latter frames of the multiple SEM images that were taken consecutively. Tolerable dose was obtained by defining a threshold point of R
NCC
where rapid reduction of R
NCC
started. A SEM image with less damage and acceptable signal-to-noise ratio was obtained by integrating the images from the initial frame to the tolerable frame.
期刊介绍:
Microscopy, previously Journal of Electron Microscopy, promotes research combined with any type of microscopy techniques, applied in life and material sciences. Microscopy is the official journal of the Japanese Society of Microscopy.