使用基于点阵的认证参考材料评估SEM中的图像失真

IF 1.8 4区 工程技术
Microscopy Pub Date : 2021-08-01 DOI:10.1093/jmicro/dfab003
Kazuhiro Kumagai;Akira Kurokawa
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引用次数: 3

摘要

本文提出了一种快速而直接的方法来评估扫描电子显微镜中的图像失真,使用认证参考材料(CRM)作为试样。CRM具有方形点阵结构,其点距具有认可值。通过图像分析计算CRM中每个点之间的距离,我们可以将图像中的失真检测为点间距的变化。此外,通过考虑认证值的不确定性,可以定量评估图像中失真的重要性。该方法使我们能够容易地从图像失真中估计不确定性,从而提高扫描电子显微镜测量的可靠性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Evaluation of image distortion in SEM by using a dot-array–based certified reference material
This paper presents a quick and straightforward method to evaluate image distortion in scanning electron microscopy using a certified reference material (CRM) as a test specimen. The CRM has a square dot-array structure, whose dot-pitch has an accredited value. By calculating the distance between each dot of the CRM via image analysis, we can detect the distortion in the image as variations of dot interval. Furthermore, by considering the uncertainty of the certified value, it is possible to quantitatively evaluate the significance of the distortion in the image. This method enables us to easily estimate the uncertainty from image distortion, which can improve the reliability of measurement by scanning electron microscopy.
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来源期刊
Microscopy
Microscopy 工程技术-显微镜技术
自引率
11.10%
发文量
0
审稿时长
>12 weeks
期刊介绍: Microscopy, previously Journal of Electron Microscopy, promotes research combined with any type of microscopy techniques, applied in life and material sciences. Microscopy is the official journal of the Japanese Society of Microscopy.
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