用于原位透射电子显微镜的液体细胞的制备

IF 1.8 4区 工程技术
Microscopy Pub Date : 2021-08-01 DOI:10.1093/jmicro/dfaa076
Xiaoguang Li;Kazutaka Mitsuishi;Masaki Takeguchi
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引用次数: 3

摘要

液体细胞透射电子显微镜(LCTEM)能够以高的空间和时间分辨率对液体中的动态过程进行成像。广泛使用的液体电池(LC)由两个堆叠的微芯片组成,中间夹着一个薄的湿样品。微芯片上垂直重叠的电子透明膜窗口为电子束提供通道。然而,尺寸不精确的微芯片通常会导致窗口对准不良,难以获得高质量的图像。在这项研究中,我们开发了一种新的高效LCTEM微芯片制造工艺,该工艺具有大的观看面积(180µm × 40µm),并评估所得LC。硅晶片表面的新定位参考标记显著提高了晶片划片的精度,使两个堆叠微芯片上的窗口能够精确对准。精确的对准导致接近观察区域边缘的液体厚度为125.6nm。我们的LC的性能通过2-nm Pt颗粒动态运动的原位透射电子显微镜成像得到了证明。这种通用且具有成本效益的微芯片生产方法可用于制造用于原位电子显微镜的其他类型的微芯片。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of a liquid cell for in situ transmission electron microscopy
Liquid cell transmission electron microscopy (LCTEM) enables imaging of dynamic processes in liquid with high spatial and temporal resolution. The widely used liquid cell (LC) consists of two stacking microchips with a thin wet sample sandwiched between them. The vertically overlapped electron-transparent membrane windows on the microchips provide passage for the electron beam. However, microchips with imprecise dimensions usually cause poor alignment of the windows and difficulty in acquiring high-quality images. In this study, we developed a new and efficient microchip fabrication process for LCTEM with a large viewing area (180 µm × 40 µm) and evaluated the resultant LC. The new positioning reference marks on the surface of the Si wafer dramatically improve the precision of dicing the wafer, making it possible to accurately align the windows on two stacking microchips. The precise alignment led to a liquid thickness of 125.6 nm close to the edge of the viewing area. The performance of our LC was demonstrated by in situ transmission electron microscopy imaging of the dynamic motions of 2-nm Pt particles. This versatile and cost-effective microchip production method can be used to fabricate other types of microchips for in situ electron microscopy.
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来源期刊
Microscopy
Microscopy 工程技术-显微镜技术
自引率
11.10%
发文量
0
审稿时长
>12 weeks
期刊介绍: Microscopy, previously Journal of Electron Microscopy, promotes research combined with any type of microscopy techniques, applied in life and material sciences. Microscopy is the official journal of the Japanese Society of Microscopy.
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