喇叭集成空气耦合PMUT测距仪,同时提高灵敏度和探测距离

IF 5.6 2区 工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY
Yan Wang , Peng Chen , Junning Zhang , Zihan Li , Hongbin Yu
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引用次数: 0

摘要

在脉冲回波工作模式下,压电微机械超声换能器(PMUT)谐振工作时的振动幅值和持续时间均与品质因子q呈正相关,因此基于PMUT的自收发测距仪必须在最大探测距离和最小探测盲区之间进行性能权衡。为了解决这一问题,将一个特别设计的喇叭形声学封装集成到具有低Q因子的准封闭式PMUT中。采用集总参数声学模型和有限元建模方法进行分析,通过优化喇叭结构,可以有效地提高PMUT的发射和接收灵敏度。同时可以很好地保持低Q特性,可以同时延长探测距离,减小探测盲区。从概念验证实验中可以看出,集成喇叭结构后,PMUT的发射灵敏度和脉冲回波信号强度分别提高了2.65和7.68倍,Q因子略有降低。结果表明,尽管有效器件面积很小,仅为0.59 mm2,但在由72.9 kHz和40 Vpp脉冲正弦信号驱动的单个PMUT上,成功地实现了覆盖142.9 mm至6 m的大探测范围,发散角为66°,发散角为- 6 dB。鉴于这种具有竞争力的性能,该方法在空气耦合超声传感应用中具有良好的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Horn-integrated air-coupled PMUT rangefinder for simultaneous sensitivity and detection range enhancement
Given the pulse-echo operation mode, the vibration amplitude and the duration time of the piezoelectric micromachined ultrasonic transducer (PMUT) worked under resonance are both positively correlated with the quality factor Q. Therefore, the PMUT-based self-transceiving rangefinders have to face performance trade-off dilemma between the maximum detection distance and the minimum detection blind area. To address this challenge, a specially designed horn-shaped acoustic package is integrated into a quasi-closed PMUT with inherently low Q factor. A lumped-parameter acoustic model and finite element modeling (FEM) method are used for analysis, through which effective enhancement of both of the transmitting and receiving sensitivities of the PMUT can be achieved by optimizing the horn configuration. At the same time, the low Q characteristic can be well maintained, enabling simultaneous detection distance extension and detection blind area reduction. From proof of concept experiment, it can be seen that after the integration of the horn structure, the emission sensitivity and the pulse-echo signal strength of the PMUT can be increased by factors of 2.65 and 7.68, respectively, with a slight decrease in Q factor. As a result, a large detection range covering from 142.9 mm to 6 m with a −6 dB divergence angle of 66° has been successfully demonstrated with a single PMUT driven by a pulsed sinusoidal signal with 72.9 kHz and 40 Vpp, despite its small effective device area of only 0.59 mm2. Provided this competitive performance, the current method possesses excellent application perspective in air-coupled ultrasonic sensing applications.
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来源期刊
Measurement
Measurement 工程技术-工程:综合
CiteScore
10.20
自引率
12.50%
发文量
1589
审稿时长
12.1 months
期刊介绍: Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.
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