Yu-Jing Yang , De-Long Zhang , Sai-Dong Xue , Ning Yuan
{"title":"基于波射流的深层微孔/纳米孔测量","authors":"Yu-Jing Yang , De-Long Zhang , Sai-Dong Xue , Ning Yuan","doi":"10.1016/j.measurement.2025.119212","DOIUrl":null,"url":null,"abstract":"<div><div>We propose to measure hole size on the basis of wave jet (WJ) generated by a dielectric scatterer and a reflective plate with a square hole to be measured. We have theoretically studied relationships of WJ characteristic parameters (including focal length, intensity and beam size) to the hole geometry (side length and depth), and found that these WJ parameters reveal monotonous relationships to the hole side length, and periodic relationships to the hole depth and the periodicity is dependent of working wavelength. By using these relationships, the hole size can be determined from measured WJ parameters. The study shows that the measurement range of hole side length can be effectively adjusted by side length of scatterer. By use of the feature that the periodicity is dependent of wavelength, hole depths in different periods can be differentiated and hole depth measurement range can be extended by multiple wavelength operation. The method not only shows excellent metrological specifications, including adequate sensitivity, large hole depth measurement range, high accuracy and small dividing value, but also has reliability, generality, scalability, robustness, simplicity, little roughness effect on measurement, and unrestriction by diffraction limit. The merits of unrestriction by diffraction limit and scalability in combination with multiple wavelength work make the method valid for measurement of deep micro/nanopores, which cannot be done using other approaches. Finally, an experimental scheme is suggested.</div></div>","PeriodicalId":18349,"journal":{"name":"Measurement","volume":"258 ","pages":"Article 119212"},"PeriodicalIF":5.6000,"publicationDate":"2025-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Measurement of deep micro/nanopore on the basis of wave jet\",\"authors\":\"Yu-Jing Yang , De-Long Zhang , Sai-Dong Xue , Ning Yuan\",\"doi\":\"10.1016/j.measurement.2025.119212\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>We propose to measure hole size on the basis of wave jet (WJ) generated by a dielectric scatterer and a reflective plate with a square hole to be measured. We have theoretically studied relationships of WJ characteristic parameters (including focal length, intensity and beam size) to the hole geometry (side length and depth), and found that these WJ parameters reveal monotonous relationships to the hole side length, and periodic relationships to the hole depth and the periodicity is dependent of working wavelength. By using these relationships, the hole size can be determined from measured WJ parameters. The study shows that the measurement range of hole side length can be effectively adjusted by side length of scatterer. By use of the feature that the periodicity is dependent of wavelength, hole depths in different periods can be differentiated and hole depth measurement range can be extended by multiple wavelength operation. The method not only shows excellent metrological specifications, including adequate sensitivity, large hole depth measurement range, high accuracy and small dividing value, but also has reliability, generality, scalability, robustness, simplicity, little roughness effect on measurement, and unrestriction by diffraction limit. The merits of unrestriction by diffraction limit and scalability in combination with multiple wavelength work make the method valid for measurement of deep micro/nanopores, which cannot be done using other approaches. Finally, an experimental scheme is suggested.</div></div>\",\"PeriodicalId\":18349,\"journal\":{\"name\":\"Measurement\",\"volume\":\"258 \",\"pages\":\"Article 119212\"},\"PeriodicalIF\":5.6000,\"publicationDate\":\"2025-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Measurement\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0263224125025710\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Measurement","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0263224125025710","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}
Measurement of deep micro/nanopore on the basis of wave jet
We propose to measure hole size on the basis of wave jet (WJ) generated by a dielectric scatterer and a reflective plate with a square hole to be measured. We have theoretically studied relationships of WJ characteristic parameters (including focal length, intensity and beam size) to the hole geometry (side length and depth), and found that these WJ parameters reveal monotonous relationships to the hole side length, and periodic relationships to the hole depth and the periodicity is dependent of working wavelength. By using these relationships, the hole size can be determined from measured WJ parameters. The study shows that the measurement range of hole side length can be effectively adjusted by side length of scatterer. By use of the feature that the periodicity is dependent of wavelength, hole depths in different periods can be differentiated and hole depth measurement range can be extended by multiple wavelength operation. The method not only shows excellent metrological specifications, including adequate sensitivity, large hole depth measurement range, high accuracy and small dividing value, but also has reliability, generality, scalability, robustness, simplicity, little roughness effect on measurement, and unrestriction by diffraction limit. The merits of unrestriction by diffraction limit and scalability in combination with multiple wavelength work make the method valid for measurement of deep micro/nanopores, which cannot be done using other approaches. Finally, an experimental scheme is suggested.
期刊介绍:
Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.