基于波射流的深层微孔/纳米孔测量

IF 5.6 2区 工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY
Yu-Jing Yang , De-Long Zhang , Sai-Dong Xue , Ning Yuan
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引用次数: 0

摘要

我们提出基于介质散射体和被测方孔反射板产生的波射流来测量孔的大小。我们从理论上研究了WJ特征参数(包括焦距、强度和光束尺寸)与孔几何形状(边长和深度)的关系,发现这些WJ参数与孔边长呈单调关系,与孔深度呈周期性关系,其周期性依赖于工作波长。利用这些关系,可以根据测量的井压参数确定孔的尺寸。研究表明,通过散射体的边长可以有效地调节孔边长的测量范围。利用其周期性随波长变化的特点,可以通过多波长操作来区分不同周期的孔深,扩大孔深测量范围。该方法不仅具有灵敏度高、孔深测量范围大、精度高、分度小等优良的计量指标,而且具有可靠性、通用性、可扩展性、鲁棒性、简单性、测量粗糙度小、不受衍射极限的限制等特点。该方法具有不受衍射极限限制、可扩展性强、可结合多波长工作等优点,可用于其他方法无法完成的深层微纳米孔的测量。最后,提出了实验方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement of deep micro/nanopore on the basis of wave jet
We propose to measure hole size on the basis of wave jet (WJ) generated by a dielectric scatterer and a reflective plate with a square hole to be measured. We have theoretically studied relationships of WJ characteristic parameters (including focal length, intensity and beam size) to the hole geometry (side length and depth), and found that these WJ parameters reveal monotonous relationships to the hole side length, and periodic relationships to the hole depth and the periodicity is dependent of working wavelength. By using these relationships, the hole size can be determined from measured WJ parameters. The study shows that the measurement range of hole side length can be effectively adjusted by side length of scatterer. By use of the feature that the periodicity is dependent of wavelength, hole depths in different periods can be differentiated and hole depth measurement range can be extended by multiple wavelength operation. The method not only shows excellent metrological specifications, including adequate sensitivity, large hole depth measurement range, high accuracy and small dividing value, but also has reliability, generality, scalability, robustness, simplicity, little roughness effect on measurement, and unrestriction by diffraction limit. The merits of unrestriction by diffraction limit and scalability in combination with multiple wavelength work make the method valid for measurement of deep micro/nanopores, which cannot be done using other approaches. Finally, an experimental scheme is suggested.
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来源期刊
Measurement
Measurement 工程技术-工程:综合
CiteScore
10.20
自引率
12.50%
发文量
1589
审稿时长
12.1 months
期刊介绍: Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.
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