通过加热靶增强激光诱导等离子体辅助烧蚀以实现蓝宝石衬底的高效高质量微加工

IF 5 2区物理与天体物理 Q1 OPTICS

Optics and Laser Technology Pub Date : 2025-10-02 DOI:10.1016/j.optlastec.2025.114023

Yilan Wu , Xiangfu Liu , Minghui Hong

{"title":"通过加热靶增强激光诱导等离子体辅助烧蚀以实现蓝宝石衬底的高效高质量微加工","authors":"Yilan Wu , Xiangfu Liu , Minghui Hong","doi":"10.1016/j.optlastec.2025.114023","DOIUrl":null,"url":null,"abstract":"<div><div>Sapphire (α-Al<sub>2</sub>O<sub>3</sub>) is widely used in high-power electronic devices. Fabricating microstructures on sapphire with high efficiency and quality remains a significant challenge. In this study, a new method is proposed to assist laser-induced plasma-assisted ablation (LIPAA) for microgrooves fabrication by heating target up to molten state and maintaining the temperature during the laser ablation. As a result, both the laser ablation threshold and the temperature differential between the irradiated and surrounding areas are significantly reduced. Laser processing parameters are optimized to increase material removal rates and decrease surface roughness. This method enables the tin target to generate a more intense plasma. The sapphire material removal rate increases by up to three times. The fabricated cross-section is clean and smooth. The sidewall roughness is reduced from 3.5 μm to 0.9 μm. The method also shows great potential for laser micromachining of other transparent materials, such as diamond, crystals, and glass.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"192 ","pages":"Article 114023"},"PeriodicalIF":5.0000,"publicationDate":"2025-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Enhancement of Laser-Induced Plasma-Assisted Ablation for High-efficiency and High-quality Micromachining of Sapphire Substrate via Heating Target\",\"authors\":\"Yilan Wu , Xiangfu Liu , Minghui Hong\",\"doi\":\"10.1016/j.optlastec.2025.114023\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Sapphire (α-Al<sub>2</sub>O<sub>3</sub>) is widely used in high-power electronic devices. Fabricating microstructures on sapphire with high efficiency and quality remains a significant challenge. In this study, a new method is proposed to assist laser-induced plasma-assisted ablation (LIPAA) for microgrooves fabrication by heating target up to molten state and maintaining the temperature during the laser ablation. As a result, both the laser ablation threshold and the temperature differential between the irradiated and surrounding areas are significantly reduced. Laser processing parameters are optimized to increase material removal rates and decrease surface roughness. This method enables the tin target to generate a more intense plasma. The sapphire material removal rate increases by up to three times. The fabricated cross-section is clean and smooth. The sidewall roughness is reduced from 3.5 μm to 0.9 μm. The method also shows great potential for laser micromachining of other transparent materials, such as diamond, crystals, and glass.</div></div>\",\"PeriodicalId\":19511,\"journal\":{\"name\":\"Optics and Laser Technology\",\"volume\":\"192 \",\"pages\":\"Article 114023\"},\"PeriodicalIF\":5.0000,\"publicationDate\":\"2025-10-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics and Laser Technology\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0030399225016147\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Laser Technology","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0030399225016147","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}

引用次数: 0

摘要

蓝宝石（α-Al2O3）广泛应用于大功率电子器件中。在蓝宝石上高效、高质量地制备微结构仍然是一个重大挑战。本研究提出了一种激光诱导等离子体辅助烧蚀（LIPAA）微沟槽制造的新方法，即在烧蚀过程中将靶材加热至熔融状态并保持温度。结果，激光烧蚀阈值和被照射区域与周围区域之间的温度差都显著降低。优化激光加工参数，提高材料去除率，降低表面粗糙度。这种方法使锡靶产生更强的等离子体。蓝宝石材料去除率提高了三倍。制作的截面干净、光滑。侧壁粗糙度由3.5 μm降至0.9 μm。该方法也显示出激光微加工其他透明材料的巨大潜力，如钻石、晶体和玻璃。

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Enhancement of Laser-Induced Plasma-Assisted Ablation for High-efficiency and High-quality Micromachining of Sapphire Substrate via Heating Target

Sapphire (α-Al₂O₃) is widely used in high-power electronic devices. Fabricating microstructures on sapphire with high efficiency and quality remains a significant challenge. In this study, a new method is proposed to assist laser-induced plasma-assisted ablation (LIPAA) for microgrooves fabrication by heating target up to molten state and maintaining the temperature during the laser ablation. As a result, both the laser ablation threshold and the temperature differential between the irradiated and surrounding areas are significantly reduced. Laser processing parameters are optimized to increase material removal rates and decrease surface roughness. This method enables the tin target to generate a more intense plasma. The sapphire material removal rate increases by up to three times. The fabricated cross-section is clean and smooth. The sidewall roughness is reduced from 3.5 μm to 0.9 μm. The method also shows great potential for laser micromachining of other transparent materials, such as diamond, crystals, and glass.

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来源期刊

Optics and Laser Technology 物理-光学

CiteScore

8.50

自引率

10.00%

发文量

1060

审稿时长

3.4 months

期刊介绍： Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems