基于区域重叠率去除的旋转对称非球面抛光伪随机路径规划

IF 5.6 2区 工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY
Mingming Lu , Jiafa Liu , Yongsheng Du , Yanbin Hou , Jieqiong Lin
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引用次数: 0

摘要

旋转对称非球面光学元件的均匀抛光一直是一个挑战,特别是在曲率不均匀的情况下。传统的固定间距随机路径往往导致覆盖不足和表面质量不均匀。为了解决这一问题,本文提出了一种基于去除区域重叠率的伪随机路径规划方法。根据旋转对称非球面的表面形状和曲率变化,得到一个路径点集,以实现等量重叠率分布。通过调整路径点的权值对路径搜索算法进行优化,使路径精确收敛到预定位置。建立了两层加速结构,包括输入算法和阻塞策略,以提高路径生成效率;集成角速度控制模块补偿曲率差异,确保所有位置的去除深度一致。实验结果表明,该方法获得的表面粗糙度方差仅为2.49 × 10−7 μm2,明显低于传统固定间距随机路径法获得的3.25 × 10−4 μm2,从而验证了该方法在抛光旋转对称非球面时的均匀覆盖和有效路径生成。该研究为提高超精密光学加工的表面质量提供了新的理论见解和实践途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Pseudo-random path planning for rotationally symmetric aspheric polishing based on the removal of regional overlap rate
Uniform polishing of rotationally symmetric aspheric optical elements has long been a challenge, especially in cases of uneven curvature. Traditional fixed-spacing random paths often result in insufficient coverage and uneven surface quality. To address this issue, the article proposes a pseudo-random path planning method based on removal of regional overlap rates. According to the surface shape and curvature changes of the rotationally symmetric non-spherical surface, a path point set is obtained for achieving an equal overlap rate distribution. Moreover, the path search algorithm is optimized by adjusting the weights of the path points, allowing the paths to precisely converge at the predetermined positions. A two-layer acceleration architecture is established, including the inputting algorithm and the blocking strategy to improve the efficiency of path generation; The integrated angular velocity control module compensates for curvature differences, ensuring consistent removal depth at all locations. The experimental results show that the surface roughness variance obtained by the proposed method is only 2.49 × 10−7 μm2, which is significantly lower than the 3.25 × 10−4 μm2 obtained by the traditional fixed-spacing random path method, thereby validating the uniform coverage and efficient path generation of this method in polishing rotationally symmetric aspherical surfaces. This research provides new theoretical insights and practical approaches for improving the surface quality of ultra-precision optical processing.
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来源期刊
Measurement
Measurement 工程技术-工程:综合
CiteScore
10.20
自引率
12.50%
发文量
1589
审稿时长
12.1 months
期刊介绍: Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.
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