{"title":"p-GaN hemt阈值电压不稳定性与栅漏电流关系的研究","authors":"Yifan Cui;Yang Jiang;Yutian Gan;Qiaoyu Hu;Qing Wang;Hongyu Yu","doi":"10.1109/JEDS.2025.3603890","DOIUrl":null,"url":null,"abstract":"This work uncovers a temperature-dependent relationship between gate leakage current (<inline-formula> <tex-math>$\\mathrm{I}_{\\mathrm{G}}$ </tex-math></inline-formula>) and threshold voltage shift (<inline-formula> <tex-math>$\\Delta \\mathrm{V}_{\\mathrm{TH}}$ </tex-math></inline-formula>) through an evaluation combining deep level transient spectroscopy (DLTS) measurements, <inline-formula> <tex-math>$\\mathrm{I}_{\\mathrm{G}}$ </tex-math></inline-formula> testing, and assessments of <inline-formula> <tex-math>$\\mathrm{V}_{\\mathrm{TH}}$ </tex-math></inline-formula> instability. Analysis across a temperature range of 80 K to 440 K of p-GaN gate defects on device characteristics. These findings indicate that the same type of gate defects simultaneously affects both gate leakage and <inline-formula> <tex-math>$\\mathrm{V}_{\\mathrm{TH}}$ </tex-math></inline-formula> instability. Specifically, defects release holes during positive gate stress. During low-bias <inline-formula> <tex-math>$\\mathrm{V}_{\\text {TH }}$ </tex-math></inline-formula> measurement, the persistent negative charge from defects, due to slow hole re-trapping, enhances the depletion of the two-dimensional electron gas (2DEG) at the AlGaN/GaN interface, reducing 2DEG density and causing a positive <inline-formula> <tex-math>$\\Delta \\mathrm{V}_{\\mathrm{TH}}$ </tex-math></inline-formula>. Furthermore, high-temperature gate bias (HTGB) stress significantly increases the concentration of relevant defects within the p-GaN gate, leading to a marked rise in both <inline-formula> <tex-math>$\\mathrm{I}_{\\mathrm{G}}$ </tex-math></inline-formula> and <inline-formula> <tex-math>$\\Delta \\mathrm{V}_{\\mathrm{TH}}$ </tex-math></inline-formula>. Notably, the <inline-formula> <tex-math>$\\mathrm{I}_{\\mathrm{G}} / \\Delta \\mathrm{V}_{\\mathrm{TH}}$ </tex-math></inline-formula> ratio remains consistent even after HTGB stress. These observations provide valuable insights into the relationship between gate defects and the performance of p-GaN gate HEMT.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"1018-1025"},"PeriodicalIF":2.4000,"publicationDate":"2025-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11148282","citationCount":"0","resultStr":"{\"title\":\"Study on the Relationship Between Threshold Voltage Instability and Gate Leakage Current in p-GaN HEMTs\",\"authors\":\"Yifan Cui;Yang Jiang;Yutian Gan;Qiaoyu Hu;Qing Wang;Hongyu Yu\",\"doi\":\"10.1109/JEDS.2025.3603890\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work uncovers a temperature-dependent relationship between gate leakage current (<inline-formula> <tex-math>$\\\\mathrm{I}_{\\\\mathrm{G}}$ </tex-math></inline-formula>) and threshold voltage shift (<inline-formula> <tex-math>$\\\\Delta \\\\mathrm{V}_{\\\\mathrm{TH}}$ </tex-math></inline-formula>) through an evaluation combining deep level transient spectroscopy (DLTS) measurements, <inline-formula> <tex-math>$\\\\mathrm{I}_{\\\\mathrm{G}}$ </tex-math></inline-formula> testing, and assessments of <inline-formula> <tex-math>$\\\\mathrm{V}_{\\\\mathrm{TH}}$ </tex-math></inline-formula> instability. Analysis across a temperature range of 80 K to 440 K of p-GaN gate defects on device characteristics. These findings indicate that the same type of gate defects simultaneously affects both gate leakage and <inline-formula> <tex-math>$\\\\mathrm{V}_{\\\\mathrm{TH}}$ </tex-math></inline-formula> instability. Specifically, defects release holes during positive gate stress. During low-bias <inline-formula> <tex-math>$\\\\mathrm{V}_{\\\\text {TH }}$ </tex-math></inline-formula> measurement, the persistent negative charge from defects, due to slow hole re-trapping, enhances the depletion of the two-dimensional electron gas (2DEG) at the AlGaN/GaN interface, reducing 2DEG density and causing a positive <inline-formula> <tex-math>$\\\\Delta \\\\mathrm{V}_{\\\\mathrm{TH}}$ </tex-math></inline-formula>. Furthermore, high-temperature gate bias (HTGB) stress significantly increases the concentration of relevant defects within the p-GaN gate, leading to a marked rise in both <inline-formula> <tex-math>$\\\\mathrm{I}_{\\\\mathrm{G}}$ </tex-math></inline-formula> and <inline-formula> <tex-math>$\\\\Delta \\\\mathrm{V}_{\\\\mathrm{TH}}$ </tex-math></inline-formula>. Notably, the <inline-formula> <tex-math>$\\\\mathrm{I}_{\\\\mathrm{G}} / \\\\Delta \\\\mathrm{V}_{\\\\mathrm{TH}}$ </tex-math></inline-formula> ratio remains consistent even after HTGB stress. These observations provide valuable insights into the relationship between gate defects and the performance of p-GaN gate HEMT.\",\"PeriodicalId\":13210,\"journal\":{\"name\":\"IEEE Journal of the Electron Devices Society\",\"volume\":\"13 \",\"pages\":\"1018-1025\"},\"PeriodicalIF\":2.4000,\"publicationDate\":\"2025-09-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11148282\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Journal of the Electron Devices Society\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11148282/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Journal of the Electron Devices Society","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11148282/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Study on the Relationship Between Threshold Voltage Instability and Gate Leakage Current in p-GaN HEMTs
This work uncovers a temperature-dependent relationship between gate leakage current ($\mathrm{I}_{\mathrm{G}}$ ) and threshold voltage shift ($\Delta \mathrm{V}_{\mathrm{TH}}$ ) through an evaluation combining deep level transient spectroscopy (DLTS) measurements, $\mathrm{I}_{\mathrm{G}}$ testing, and assessments of $\mathrm{V}_{\mathrm{TH}}$ instability. Analysis across a temperature range of 80 K to 440 K of p-GaN gate defects on device characteristics. These findings indicate that the same type of gate defects simultaneously affects both gate leakage and $\mathrm{V}_{\mathrm{TH}}$ instability. Specifically, defects release holes during positive gate stress. During low-bias $\mathrm{V}_{\text {TH }}$ measurement, the persistent negative charge from defects, due to slow hole re-trapping, enhances the depletion of the two-dimensional electron gas (2DEG) at the AlGaN/GaN interface, reducing 2DEG density and causing a positive $\Delta \mathrm{V}_{\mathrm{TH}}$ . Furthermore, high-temperature gate bias (HTGB) stress significantly increases the concentration of relevant defects within the p-GaN gate, leading to a marked rise in both $\mathrm{I}_{\mathrm{G}}$ and $\Delta \mathrm{V}_{\mathrm{TH}}$ . Notably, the $\mathrm{I}_{\mathrm{G}} / \Delta \mathrm{V}_{\mathrm{TH}}$ ratio remains consistent even after HTGB stress. These observations provide valuable insights into the relationship between gate defects and the performance of p-GaN gate HEMT.
期刊介绍:
The IEEE Journal of the Electron Devices Society (J-EDS) is an open-access, fully electronic scientific journal publishing papers ranging from fundamental to applied research that are scientifically rigorous and relevant to electron devices. The J-EDS publishes original and significant contributions relating to the theory, modelling, design, performance, and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanodevices, optoelectronics, photovoltaics, power IC''s, and micro-sensors. Tutorial and review papers on these subjects are, also, published. And, occasionally special issues with a collection of papers on particular areas in more depth and breadth are, also, published. J-EDS publishes all papers that are judged to be technically valid and original.