{"title":"厘米级二维ReS2xSe2(1-x)合金薄膜的可控生长和光电探测器","authors":"Aixiang Wei , Jirun Zou , Yu zhao , Deyu Xu","doi":"10.1016/j.mssp.2025.110075","DOIUrl":null,"url":null,"abstract":"<div><div>Band-gap engineering in two-dimensional (2D) transition metal dichalcogenides (TMDs) is crucial for advancing nanoelectronics and optoelectronic applications. Alloying TMDs with different band gaps enable precise bandgap tuning through compositional control. In this work, centimeter-scale 2D ReS<sub>2x</sub>Se<sub>2(1-x)</sub> alloy films with a tunable sulfur content (x) were successfully grown on mica substrates via chemical vapor deposition (CVD) by varying the S/Se precursor ratio. The ReS<sub>2x</sub>Se<sub>2(1-x)</sub> alloy films are polycrystalline films with grain sizes of several nanometers to several tens of nanometers. The back-gated field-effect transistors (FETs) fabricated from these alloys exhibited composition-dependent electrical properties: pure ReS<sub>2</sub> exhibited n-type conduction behavior, whereas pure ReSe<sub>2</sub> and ReS<sub>2x</sub>Se<sub>2(1-x)</sub> alloys exhibited p-type conduction behavior, with ReS<sub>0.98</sub>Se<sub>1.02</sub> achieving the highest hole mobility of 2.6 cm<sup>2</sup>/(V·s). An ohmic contact was formed between the Au electrodes and alloy channels. Photodetectors based on these alloys displayed composition-tunable spectral responses from the ultraviolet–visible range to the near-infrared range. The alloys with a S content of 2x < 1 exhibited optimal photoresponsivity at 532 nm and 635 nm, whereas those with S composition of 2x > 1 showed superior performance at 405 nm. Photodetectors based on ReS<sub>1.82</sub>Se<sub>0.18</sub> have a photoresponsivity of 0.06 AW<sup>-1</sup> and rise/decay times of 0.30/0.10 s under 405 nm light irradiation, respectively, whereas the ReS<sub>0.98</sub>Se<sub>1.02</sub>-based device has photoresponsivities of 0.02 and 0.02 AW<sup>-1</sup> and rise/decay times of 0.16/0.16 and 0.14/0.12 s under 532 and 635 nm light irradiation, respectively. This trend directly correlates with the composition-tunable bandgap of the alloys. This work advances the scalable synthesis of ReS<sub>2x</sub>Se<sub>2(1-x)</sub> films and demonstrates their potential for wavelength-selective optoelectronic applications.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"201 ","pages":"Article 110075"},"PeriodicalIF":4.6000,"publicationDate":"2025-09-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Controllable growth and photodetectors of centimeter-scale 2D ReS2xSe2(1-x) alloy films\",\"authors\":\"Aixiang Wei , Jirun Zou , Yu zhao , Deyu Xu\",\"doi\":\"10.1016/j.mssp.2025.110075\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Band-gap engineering in two-dimensional (2D) transition metal dichalcogenides (TMDs) is crucial for advancing nanoelectronics and optoelectronic applications. Alloying TMDs with different band gaps enable precise bandgap tuning through compositional control. In this work, centimeter-scale 2D ReS<sub>2x</sub>Se<sub>2(1-x)</sub> alloy films with a tunable sulfur content (x) were successfully grown on mica substrates via chemical vapor deposition (CVD) by varying the S/Se precursor ratio. The ReS<sub>2x</sub>Se<sub>2(1-x)</sub> alloy films are polycrystalline films with grain sizes of several nanometers to several tens of nanometers. The back-gated field-effect transistors (FETs) fabricated from these alloys exhibited composition-dependent electrical properties: pure ReS<sub>2</sub> exhibited n-type conduction behavior, whereas pure ReSe<sub>2</sub> and ReS<sub>2x</sub>Se<sub>2(1-x)</sub> alloys exhibited p-type conduction behavior, with ReS<sub>0.98</sub>Se<sub>1.02</sub> achieving the highest hole mobility of 2.6 cm<sup>2</sup>/(V·s). An ohmic contact was formed between the Au electrodes and alloy channels. Photodetectors based on these alloys displayed composition-tunable spectral responses from the ultraviolet–visible range to the near-infrared range. The alloys with a S content of 2x < 1 exhibited optimal photoresponsivity at 532 nm and 635 nm, whereas those with S composition of 2x > 1 showed superior performance at 405 nm. Photodetectors based on ReS<sub>1.82</sub>Se<sub>0.18</sub> have a photoresponsivity of 0.06 AW<sup>-1</sup> and rise/decay times of 0.30/0.10 s under 405 nm light irradiation, respectively, whereas the ReS<sub>0.98</sub>Se<sub>1.02</sub>-based device has photoresponsivities of 0.02 and 0.02 AW<sup>-1</sup> and rise/decay times of 0.16/0.16 and 0.14/0.12 s under 532 and 635 nm light irradiation, respectively. This trend directly correlates with the composition-tunable bandgap of the alloys. This work advances the scalable synthesis of ReS<sub>2x</sub>Se<sub>2(1-x)</sub> films and demonstrates their potential for wavelength-selective optoelectronic applications.</div></div>\",\"PeriodicalId\":18240,\"journal\":{\"name\":\"Materials Science in Semiconductor Processing\",\"volume\":\"201 \",\"pages\":\"Article 110075\"},\"PeriodicalIF\":4.6000,\"publicationDate\":\"2025-09-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Science in Semiconductor Processing\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1369800125008121\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science in Semiconductor Processing","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1369800125008121","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Controllable growth and photodetectors of centimeter-scale 2D ReS2xSe2(1-x) alloy films
Band-gap engineering in two-dimensional (2D) transition metal dichalcogenides (TMDs) is crucial for advancing nanoelectronics and optoelectronic applications. Alloying TMDs with different band gaps enable precise bandgap tuning through compositional control. In this work, centimeter-scale 2D ReS2xSe2(1-x) alloy films with a tunable sulfur content (x) were successfully grown on mica substrates via chemical vapor deposition (CVD) by varying the S/Se precursor ratio. The ReS2xSe2(1-x) alloy films are polycrystalline films with grain sizes of several nanometers to several tens of nanometers. The back-gated field-effect transistors (FETs) fabricated from these alloys exhibited composition-dependent electrical properties: pure ReS2 exhibited n-type conduction behavior, whereas pure ReSe2 and ReS2xSe2(1-x) alloys exhibited p-type conduction behavior, with ReS0.98Se1.02 achieving the highest hole mobility of 2.6 cm2/(V·s). An ohmic contact was formed between the Au electrodes and alloy channels. Photodetectors based on these alloys displayed composition-tunable spectral responses from the ultraviolet–visible range to the near-infrared range. The alloys with a S content of 2x < 1 exhibited optimal photoresponsivity at 532 nm and 635 nm, whereas those with S composition of 2x > 1 showed superior performance at 405 nm. Photodetectors based on ReS1.82Se0.18 have a photoresponsivity of 0.06 AW-1 and rise/decay times of 0.30/0.10 s under 405 nm light irradiation, respectively, whereas the ReS0.98Se1.02-based device has photoresponsivities of 0.02 and 0.02 AW-1 and rise/decay times of 0.16/0.16 and 0.14/0.12 s under 532 and 635 nm light irradiation, respectively. This trend directly correlates with the composition-tunable bandgap of the alloys. This work advances the scalable synthesis of ReS2xSe2(1-x) films and demonstrates their potential for wavelength-selective optoelectronic applications.
期刊介绍:
Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.
Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.
Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.