High blocking voltage and low on-state voltage drop 4H-SiC p-channel IGBTs with optimized multizone floating field rings

A novel multizone floating field ring (M−FFR) edge termination structure with individually increasing ring spacing has been proposed, fabricated, and measured for 4H-silicon carbide (4H-SiC) p-channel insulated gate bipolar transistors (IGBTs). This M−FFR design effectively suppresses electric field crowding at the termination edge while maintaining a high tolerance to oxide charge accumulation. Numerical simulations indicate that the M−FFR achieves a 17.4 % higher blocking voltage compared to conventional equidistant floating field ring (Con-FFR) designs. Importantly, the proposed structure requires no complex fabrication steps or additional lithography processes, reducing manufacturing cost and complexity. To further enhance device performance, carrier lifetime enhancement techniques were applied to reduce the on-state voltage drop (V_f). Experimental measurements confirm that the fabricated p-channel SiC IGBTs are capable of sustaining blocking voltages exceeding 10 kV with leakage currents below 300nA. At a gate voltage of −20 V, a V_f of 5.77 V and a low differential specific on-resistance (R_on,sp,diff) of 17.5 mΩ·cm² were achieved. These results suggest that the device is promising for applications in high-power electronic devices.