Hao Yu , Yanqiong Yuan , Jian Wang , Linhua Liu , Zhiwei Fu , Jia-Yue Yang
{"title":"高温应力下Cu柱/Ni/Sn微凸起中Ni3Sn4层生长行为研究","authors":"Hao Yu , Yanqiong Yuan , Jian Wang , Linhua Liu , Zhiwei Fu , Jia-Yue Yang","doi":"10.1016/j.mssp.2025.110058","DOIUrl":null,"url":null,"abstract":"<div><div>Based on the numerical analysis of Ni atomic thermal diffusion flux, a kinetic model for the growth of the Ni<sub>3</sub>Sn<sub>4</sub> intermetallic compound at the Cu pillar/Ni/Sn microbump interface under high-temperature stress is established. Through in-situ microscopic comparative analysis of test samples at 100 °C, 125 °C and 150 °C over varying time intervals, it is observed that at 150 °C Ni<sub>3</sub>Sn<sub>4</sub> exhibits pronounced outward protrusion due to volumetric expansion. The maximum deviation between the model-predicted and experimentally measured Ni<sub>3</sub>Sn<sub>4</sub> thickness is only 0.244 μm (14.8 %). Further analysis of the Ni<sub>3</sub>Sn<sub>4</sub> growth behavior based on the model reveals that its growth rate decreases progressively with increasing thickness. As the Ni<sub>3</sub>Sn<sub>4</sub> thickness increases from 600 nm to 1600 nm, its growth rates at 100 °C, 125 °C, and 150 °C decrease from 0.10 nm/h, 1.22 nm/h, and 7.79 nm/h to 0.04 nm/h, 0.45 nm/h, and 2.93 nm/h, respectively, resulting in a parabolic growth trend of Ni<sub>3</sub>Sn<sub>4</sub> thickness over time. The growth rate of Ni<sub>3</sub>Sn<sub>4</sub> exhibits an exponential increase as a function of temperature. The temperatures corresponding to growth rates below 0.01 nm/h and above 1 nm/h are defined as the inflection point temperatures of “slow-growth” and “explosive-growth” modes, respectively. Since the growth rate of Ni<sub>3</sub>Sn<sub>4</sub> gradually decreases with increasing thickness, the two inflection point temperatures also vary with the Ni<sub>3</sub>Sn<sub>4</sub> thickness.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"201 ","pages":"Article 110058"},"PeriodicalIF":4.6000,"publicationDate":"2025-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study on the growth behavior of Ni3Sn4 layer in Cu pillar/Ni/Sn microbump under high-temperature stress\",\"authors\":\"Hao Yu , Yanqiong Yuan , Jian Wang , Linhua Liu , Zhiwei Fu , Jia-Yue Yang\",\"doi\":\"10.1016/j.mssp.2025.110058\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Based on the numerical analysis of Ni atomic thermal diffusion flux, a kinetic model for the growth of the Ni<sub>3</sub>Sn<sub>4</sub> intermetallic compound at the Cu pillar/Ni/Sn microbump interface under high-temperature stress is established. Through in-situ microscopic comparative analysis of test samples at 100 °C, 125 °C and 150 °C over varying time intervals, it is observed that at 150 °C Ni<sub>3</sub>Sn<sub>4</sub> exhibits pronounced outward protrusion due to volumetric expansion. The maximum deviation between the model-predicted and experimentally measured Ni<sub>3</sub>Sn<sub>4</sub> thickness is only 0.244 μm (14.8 %). Further analysis of the Ni<sub>3</sub>Sn<sub>4</sub> growth behavior based on the model reveals that its growth rate decreases progressively with increasing thickness. As the Ni<sub>3</sub>Sn<sub>4</sub> thickness increases from 600 nm to 1600 nm, its growth rates at 100 °C, 125 °C, and 150 °C decrease from 0.10 nm/h, 1.22 nm/h, and 7.79 nm/h to 0.04 nm/h, 0.45 nm/h, and 2.93 nm/h, respectively, resulting in a parabolic growth trend of Ni<sub>3</sub>Sn<sub>4</sub> thickness over time. The growth rate of Ni<sub>3</sub>Sn<sub>4</sub> exhibits an exponential increase as a function of temperature. The temperatures corresponding to growth rates below 0.01 nm/h and above 1 nm/h are defined as the inflection point temperatures of “slow-growth” and “explosive-growth” modes, respectively. Since the growth rate of Ni<sub>3</sub>Sn<sub>4</sub> gradually decreases with increasing thickness, the two inflection point temperatures also vary with the Ni<sub>3</sub>Sn<sub>4</sub> thickness.</div></div>\",\"PeriodicalId\":18240,\"journal\":{\"name\":\"Materials Science in Semiconductor Processing\",\"volume\":\"201 \",\"pages\":\"Article 110058\"},\"PeriodicalIF\":4.6000,\"publicationDate\":\"2025-09-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Science in Semiconductor Processing\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1369800125007954\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science in Semiconductor Processing","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1369800125007954","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Study on the growth behavior of Ni3Sn4 layer in Cu pillar/Ni/Sn microbump under high-temperature stress
Based on the numerical analysis of Ni atomic thermal diffusion flux, a kinetic model for the growth of the Ni3Sn4 intermetallic compound at the Cu pillar/Ni/Sn microbump interface under high-temperature stress is established. Through in-situ microscopic comparative analysis of test samples at 100 °C, 125 °C and 150 °C over varying time intervals, it is observed that at 150 °C Ni3Sn4 exhibits pronounced outward protrusion due to volumetric expansion. The maximum deviation between the model-predicted and experimentally measured Ni3Sn4 thickness is only 0.244 μm (14.8 %). Further analysis of the Ni3Sn4 growth behavior based on the model reveals that its growth rate decreases progressively with increasing thickness. As the Ni3Sn4 thickness increases from 600 nm to 1600 nm, its growth rates at 100 °C, 125 °C, and 150 °C decrease from 0.10 nm/h, 1.22 nm/h, and 7.79 nm/h to 0.04 nm/h, 0.45 nm/h, and 2.93 nm/h, respectively, resulting in a parabolic growth trend of Ni3Sn4 thickness over time. The growth rate of Ni3Sn4 exhibits an exponential increase as a function of temperature. The temperatures corresponding to growth rates below 0.01 nm/h and above 1 nm/h are defined as the inflection point temperatures of “slow-growth” and “explosive-growth” modes, respectively. Since the growth rate of Ni3Sn4 gradually decreases with increasing thickness, the two inflection point temperatures also vary with the Ni3Sn4 thickness.
期刊介绍:
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