Jinyan Wang , Quan Zheng , Bin Wang , Xiaohua Wang , Shijie Li , Qi Li , Xi Chen
{"title":"使用可调重复率的721 nm空腔倾倒Pr:YLF激光器产生194 nm深紫外脉冲","authors":"Jinyan Wang , Quan Zheng , Bin Wang , Xiaohua Wang , Shijie Li , Qi Li , Xi Chen","doi":"10.1016/j.optlastec.2025.113882","DOIUrl":null,"url":null,"abstract":"<div><div>A compact 194 nm laser with a few-ns pulse from 5 to 15 kHz is developed by frequency mixing a red Pr-doped laser with a fourth-harmonic Nd-doped laser. The red laser was generated by electro-optic Q-switched cavity dumping, which has kW peak power and constant short pulse duration. The maximum average output power of 34.7 mW at 194 nm was realized at 7 kHz. The pulse duration was maintained at 5.1 ns, which is independent of the repetition rate. The maximum pulse energy of 5.7 μJ was obtained at 5 kHz, and the corresponding peak power was up to 1.12 kW.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"192 ","pages":"Article 113882"},"PeriodicalIF":5.0000,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Generation of 194 nm Deep-UV pulses using a Cavity-Dumped 721 nm Pr:YLF laser with Tunable repetition rates\",\"authors\":\"Jinyan Wang , Quan Zheng , Bin Wang , Xiaohua Wang , Shijie Li , Qi Li , Xi Chen\",\"doi\":\"10.1016/j.optlastec.2025.113882\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>A compact 194 nm laser with a few-ns pulse from 5 to 15 kHz is developed by frequency mixing a red Pr-doped laser with a fourth-harmonic Nd-doped laser. The red laser was generated by electro-optic Q-switched cavity dumping, which has kW peak power and constant short pulse duration. The maximum average output power of 34.7 mW at 194 nm was realized at 7 kHz. The pulse duration was maintained at 5.1 ns, which is independent of the repetition rate. The maximum pulse energy of 5.7 μJ was obtained at 5 kHz, and the corresponding peak power was up to 1.12 kW.</div></div>\",\"PeriodicalId\":19511,\"journal\":{\"name\":\"Optics and Laser Technology\",\"volume\":\"192 \",\"pages\":\"Article 113882\"},\"PeriodicalIF\":5.0000,\"publicationDate\":\"2025-09-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics and Laser Technology\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0030399225014732\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Laser Technology","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0030399225014732","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
Generation of 194 nm Deep-UV pulses using a Cavity-Dumped 721 nm Pr:YLF laser with Tunable repetition rates
A compact 194 nm laser with a few-ns pulse from 5 to 15 kHz is developed by frequency mixing a red Pr-doped laser with a fourth-harmonic Nd-doped laser. The red laser was generated by electro-optic Q-switched cavity dumping, which has kW peak power and constant short pulse duration. The maximum average output power of 34.7 mW at 194 nm was realized at 7 kHz. The pulse duration was maintained at 5.1 ns, which is independent of the repetition rate. The maximum pulse energy of 5.7 μJ was obtained at 5 kHz, and the corresponding peak power was up to 1.12 kW.
期刊介绍:
Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication.
The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas:
•development in all types of lasers
•developments in optoelectronic devices and photonics
•developments in new photonics and optical concepts
•developments in conventional optics, optical instruments and components
•techniques of optical metrology, including interferometry and optical fibre sensors
•LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow
•applications of lasers to materials processing, optical NDT display (including holography) and optical communication
•research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume)
•developments in optical computing and optical information processing
•developments in new optical materials
•developments in new optical characterization methods and techniques
•developments in quantum optics
•developments in light assisted micro and nanofabrication methods and techniques
•developments in nanophotonics and biophotonics
•developments in imaging processing and systems