低真空扫描电镜中二次电子超变压探测器的表征。

IF 1.9
Yuanzhao Yao, Ryosuke Sonoda, Yasunari Sohda, Takashi Sekiguchi
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引用次数: 0

摘要

扫描电子显微镜(SEM)在低真空下的观察可以克服试样表面带电的问题,允许在没有样品预处理的情况下观察绝缘样品。超变压探测器(UVD)是一种用于扫描电镜低真空观测的二次电子探测器。它的工作原理是收集二次电子和气体分子碰撞时释放的光信号。在本研究中,我们提出了一种简单的方法,使用不锈钢(SUS)球来表征低真空扫描电镜下UVD信号的特征,并将其与传统的埃弗哈特-索恩利(E-T)探测器在普通扫描电镜下进行比较。UVD信号在剖面上表现出与E-T探测器不同的特征,即双圆峰特征。通过实验和模拟,我们发现在较高的真空水平(如几Pa), se是UVD信号的主要贡献者,表现出与E-T信号相似的特征。随着真空度的降低,在30 Pa时,UVD信号的主要贡献从se转移到低能量背散射电子(BSE)。我们的发现表明,通过调节腔压力,我们可以在SE和低能量BSE特征之间改变UVD图像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of ultra-variable-pressure detector for secondary electrons in low vacuum SEM.

Scanning electron microscope (SEM) observation in low vacuum can overcome the issue of charge-up at the specimen surface, allowing for the observation of insulating samples without sample pretreatment. The ultra-variable-pressure detector (UVD) was developed as a secondary electron (SE) detector for the low vacuum observation in SEM. It works by collecting the light signal released from the collision between secondary electrons and gas molecules. In this study, we propose a simple method using a stainless steel (SUS) sphere to characterize the feature of UVD signal in low vacuum SEM, and compare it with the traditional Everhart-Thornley (E-T) detector in normal SEM. The UVD signal showed characteristic features, namely a two-round-peak feature in the profile, which is different from that of E-T detector. By experiment and simulation, we revealed that at higher vacuum levels (as a few Pa), SEs provide the primary contribution to the UVD signal, exhibiting a profile similar to that of the E-T signal. As the vacuum deteriorates, as 30 Pa, the main contribution to the UVD signal shifts from SEs to low energy backscattered electrons (BSE). Our finding indicates that by tuning the chamber pressure, we can vary the UVD image between SE and low energy BSE features.

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