{"title":"基于3nm IRDS投影的无结叉片FET设计空间可变性和实验可行性:对下一代数字、模拟/RF和电路应用的影响","authors":"Kavya Mulaga , Mohan Siva Kumar Mattaparthi , Ramya Dalai , Sresta Valasa , Venkata Ramakrishna Kotha , Sunitha Bhukya , Narendar Vadthiya","doi":"10.1016/j.sse.2025.109231","DOIUrl":null,"url":null,"abstract":"<div><div>This article explores the digital and analog/RF figures of merit (FOMs), and circuit performances for finding the optimal design space targeted at sub-3 nm technology node for the Junctionless Forksheet FET (JL FS-FET). Within the sub-3 nm node, the gate length (L<sub>g</sub>), width (W<sub>FS</sub>), and thickness (T<sub>FS</sub>) are varied between 6 nm–14 nm, 20 nm–40 nm, and 5 nm–9 nm respectively. An optimal design space of L<sub>g</sub> = 6 nm − 12 nm can be chosen for digital and analog/RF applications in the sub-3 nm technology node and scaling of L<sub>g</sub> > 12 nm is not suitable for designed JL-FSFET since it gives deteriorated A<sub>v</sub> and f<sub>T</sub> which are the primary performance metrics to boost the device performance. Additionally, lowering the W<sub>FS</sub> and T<sub>FS</sub> is an optimal choice for improving the digital and analog performance whereas higher W<sub>FS</sub> and T<sub>FS</sub> should be opted for better RF performance in the sub-3 nm technology node. Moreover, stacking the sheets is a good idea to enhance the analog/RF performance at the cost of compromised A<sub>v</sub> whereas an improper choice for digital performance. Further, the JL-FSFET based CMOS inverter layout cell for the optimal dimensions (L<sub>g</sub> = 12 nm, T<sub>FS</sub> = 5 nm, W<sub>FS</sub> = 20 nm) provided better noise margins, gain of ∼9.82 V/V, and delay of ∼5.8 ps making the designed device to be adopted into digital ICs. These findings suggest that design space at sub-3 nm node hold significant potential for optimizing JL-FSFET performance for future device and circuit development.</div></div>","PeriodicalId":21909,"journal":{"name":"Solid-state Electronics","volume":"230 ","pages":"Article 109231"},"PeriodicalIF":1.4000,"publicationDate":"2025-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A 3 nm IRDS projection based design space variability and experimental feasibility in junctionless forksheet FET: implications for next-generation digital, analog/RF, and circuit applications\",\"authors\":\"Kavya Mulaga , Mohan Siva Kumar Mattaparthi , Ramya Dalai , Sresta Valasa , Venkata Ramakrishna Kotha , Sunitha Bhukya , Narendar Vadthiya\",\"doi\":\"10.1016/j.sse.2025.109231\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This article explores the digital and analog/RF figures of merit (FOMs), and circuit performances for finding the optimal design space targeted at sub-3 nm technology node for the Junctionless Forksheet FET (JL FS-FET). Within the sub-3 nm node, the gate length (L<sub>g</sub>), width (W<sub>FS</sub>), and thickness (T<sub>FS</sub>) are varied between 6 nm–14 nm, 20 nm–40 nm, and 5 nm–9 nm respectively. An optimal design space of L<sub>g</sub> = 6 nm − 12 nm can be chosen for digital and analog/RF applications in the sub-3 nm technology node and scaling of L<sub>g</sub> > 12 nm is not suitable for designed JL-FSFET since it gives deteriorated A<sub>v</sub> and f<sub>T</sub> which are the primary performance metrics to boost the device performance. Additionally, lowering the W<sub>FS</sub> and T<sub>FS</sub> is an optimal choice for improving the digital and analog performance whereas higher W<sub>FS</sub> and T<sub>FS</sub> should be opted for better RF performance in the sub-3 nm technology node. Moreover, stacking the sheets is a good idea to enhance the analog/RF performance at the cost of compromised A<sub>v</sub> whereas an improper choice for digital performance. Further, the JL-FSFET based CMOS inverter layout cell for the optimal dimensions (L<sub>g</sub> = 12 nm, T<sub>FS</sub> = 5 nm, W<sub>FS</sub> = 20 nm) provided better noise margins, gain of ∼9.82 V/V, and delay of ∼5.8 ps making the designed device to be adopted into digital ICs. These findings suggest that design space at sub-3 nm node hold significant potential for optimizing JL-FSFET performance for future device and circuit development.</div></div>\",\"PeriodicalId\":21909,\"journal\":{\"name\":\"Solid-state Electronics\",\"volume\":\"230 \",\"pages\":\"Article 109231\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2025-08-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Solid-state Electronics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0038110125001765\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solid-state Electronics","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0038110125001765","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
A 3 nm IRDS projection based design space variability and experimental feasibility in junctionless forksheet FET: implications for next-generation digital, analog/RF, and circuit applications
This article explores the digital and analog/RF figures of merit (FOMs), and circuit performances for finding the optimal design space targeted at sub-3 nm technology node for the Junctionless Forksheet FET (JL FS-FET). Within the sub-3 nm node, the gate length (Lg), width (WFS), and thickness (TFS) are varied between 6 nm–14 nm, 20 nm–40 nm, and 5 nm–9 nm respectively. An optimal design space of Lg = 6 nm − 12 nm can be chosen for digital and analog/RF applications in the sub-3 nm technology node and scaling of Lg > 12 nm is not suitable for designed JL-FSFET since it gives deteriorated Av and fT which are the primary performance metrics to boost the device performance. Additionally, lowering the WFS and TFS is an optimal choice for improving the digital and analog performance whereas higher WFS and TFS should be opted for better RF performance in the sub-3 nm technology node. Moreover, stacking the sheets is a good idea to enhance the analog/RF performance at the cost of compromised Av whereas an improper choice for digital performance. Further, the JL-FSFET based CMOS inverter layout cell for the optimal dimensions (Lg = 12 nm, TFS = 5 nm, WFS = 20 nm) provided better noise margins, gain of ∼9.82 V/V, and delay of ∼5.8 ps making the designed device to be adopted into digital ICs. These findings suggest that design space at sub-3 nm node hold significant potential for optimizing JL-FSFET performance for future device and circuit development.
期刊介绍:
It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.