{"title":"用于高灵敏度生物传感器的负电容场效应晶体管的解析建模","authors":"Xian Wu;Sen Gao;Lei Xiao;Jing Wang","doi":"10.1109/TED.2025.3589197","DOIUrl":null,"url":null,"abstract":"The subthreshold swing (SS) of conventional field-effect transistors (FETs) is fundamentally limited to 60 mV/dec at room temperature, which significantly constrains the sensitivity of biosensors in detecting weak biological signals effectively. To address this bottleneck, we present a comprehensive, physics-based, and circuit-compatible analytical model for a 2-D material negative capacitance FET (NCFET) biosensor. The model features a top-gate architecture incorporating a HfZrO (HZO) ferroelectric layer for the first time, designed to be fully compatible with standard semiconductor fabrication processes. It provides a robust theoretical framework for accurately predicting the performance of NCFET biosensors (NC-BioFET) and addresses the limitations of traditional FETs. Using an n-WSe2 NCFET biosensor as an example, we validate the model through extensive simulations, achieving an SS as low as 30 mV/dec and demonstrating excellent pH sensing performance. In a model-constructed aqueous environment, the sensor exhibits an impressive pH detection sensitivity of 1799/pH, significantly outperforming the 461/pH sensitivity observed in its conventional FET biosensor. Furthermore, to validate the accuracy of the model, we fabricated WSe2 NCFET biosensors and tested their response across a range of pH. The model shows excellent agreement with experimental results in terms of drain current, SS, and voltage/current sensitivity. This work establishes a robust theoretical and experimental foundation for the design and optimization of high-performance and low-power biosensors. It also bridges the gap between NCFET technology and biosensing applications, paving the way for next-generation biosensors with ultrahigh sensitivity and superior signal detection capabilities.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":"72 9","pages":"5154-5162"},"PeriodicalIF":3.2000,"publicationDate":"2025-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Analytical Modeling of Negative Capacitance Field-Effect Transistor for Highly Sensitive Biosensor Applications\",\"authors\":\"Xian Wu;Sen Gao;Lei Xiao;Jing Wang\",\"doi\":\"10.1109/TED.2025.3589197\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The subthreshold swing (SS) of conventional field-effect transistors (FETs) is fundamentally limited to 60 mV/dec at room temperature, which significantly constrains the sensitivity of biosensors in detecting weak biological signals effectively. To address this bottleneck, we present a comprehensive, physics-based, and circuit-compatible analytical model for a 2-D material negative capacitance FET (NCFET) biosensor. The model features a top-gate architecture incorporating a HfZrO (HZO) ferroelectric layer for the first time, designed to be fully compatible with standard semiconductor fabrication processes. It provides a robust theoretical framework for accurately predicting the performance of NCFET biosensors (NC-BioFET) and addresses the limitations of traditional FETs. Using an n-WSe2 NCFET biosensor as an example, we validate the model through extensive simulations, achieving an SS as low as 30 mV/dec and demonstrating excellent pH sensing performance. In a model-constructed aqueous environment, the sensor exhibits an impressive pH detection sensitivity of 1799/pH, significantly outperforming the 461/pH sensitivity observed in its conventional FET biosensor. Furthermore, to validate the accuracy of the model, we fabricated WSe2 NCFET biosensors and tested their response across a range of pH. The model shows excellent agreement with experimental results in terms of drain current, SS, and voltage/current sensitivity. This work establishes a robust theoretical and experimental foundation for the design and optimization of high-performance and low-power biosensors. It also bridges the gap between NCFET technology and biosensing applications, paving the way for next-generation biosensors with ultrahigh sensitivity and superior signal detection capabilities.\",\"PeriodicalId\":13092,\"journal\":{\"name\":\"IEEE Transactions on Electron Devices\",\"volume\":\"72 9\",\"pages\":\"5154-5162\"},\"PeriodicalIF\":3.2000,\"publicationDate\":\"2025-07-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Electron Devices\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11097330/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Electron Devices","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11097330/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Analytical Modeling of Negative Capacitance Field-Effect Transistor for Highly Sensitive Biosensor Applications
The subthreshold swing (SS) of conventional field-effect transistors (FETs) is fundamentally limited to 60 mV/dec at room temperature, which significantly constrains the sensitivity of biosensors in detecting weak biological signals effectively. To address this bottleneck, we present a comprehensive, physics-based, and circuit-compatible analytical model for a 2-D material negative capacitance FET (NCFET) biosensor. The model features a top-gate architecture incorporating a HfZrO (HZO) ferroelectric layer for the first time, designed to be fully compatible with standard semiconductor fabrication processes. It provides a robust theoretical framework for accurately predicting the performance of NCFET biosensors (NC-BioFET) and addresses the limitations of traditional FETs. Using an n-WSe2 NCFET biosensor as an example, we validate the model through extensive simulations, achieving an SS as low as 30 mV/dec and demonstrating excellent pH sensing performance. In a model-constructed aqueous environment, the sensor exhibits an impressive pH detection sensitivity of 1799/pH, significantly outperforming the 461/pH sensitivity observed in its conventional FET biosensor. Furthermore, to validate the accuracy of the model, we fabricated WSe2 NCFET biosensors and tested their response across a range of pH. The model shows excellent agreement with experimental results in terms of drain current, SS, and voltage/current sensitivity. This work establishes a robust theoretical and experimental foundation for the design and optimization of high-performance and low-power biosensors. It also bridges the gap between NCFET technology and biosensing applications, paving the way for next-generation biosensors with ultrahigh sensitivity and superior signal detection capabilities.
期刊介绍:
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.