CrAlN/SiCN纳米复合涂层具有增强的机械性能、热稳定性和抗氧化性

IF 2 4区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS

Thin Solid Films Pub Date : 2025-08-05 DOI:10.1016/j.tsf.2025.140760

Seungwon Lee , Taiki Tsuchiya , Kenji Matsuda , Yoshifumi Aoi , Susumu Ikeno , Masateru Nose

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引用次数: 0

摘要

使用CrN/SiCN作为刀具防护涂层材料，必须抑制由工作材料中的主要元素铁（Fe）扩散到防护涂层中引起的凹坑磨损。选择铝（Al）是因为它能够通过与碳的还原反应最大限度地减少碳化物的形成，并开发了一种（Cr₀.₆₉Al₀.₃₁）N/SiCN涂层。沉积的（Cr₀.₆₉Al₀.₃₁）N/SiCN涂层的压痕硬度（HIT）和杨氏模量（EIT）分别达到最大值~ 35 GPa和340 GPa。经1100 K真空热处理1 h后，HIT值进一步提高。然而，在大气条件下1100 K热处理1 h后，HIT值与沉积状态相比变化很小。扫描电子显微镜-能量色散x射线光谱（SEM-EDS）分析以及透射电子显微镜（TEM）和扫描透射电子显微镜（STEM）观察表明，与CrN/SiCN涂层相比，（Cr₀.₆₉Al₀.₃₁）N/SiCN涂层的氧化和Fe扩散明显受到抑制。在（Cr₀.₆₉Al₀.₃₁）N/SiCN涂层中，即使Fe扩散到涂层中，Fe- si、Cr- c等化合物的形成也很少，颗粒的粗化可以忽略不计。这些结果表明，（Cr₀.₆₉Al₀.₃₁）N/SiCN涂层是切削工具防护涂层的一个有希望的候选者。

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CrAlN/SiCN nanocomposite coatings with enhanced mechanical properties, thermal stability, and oxidation resistance

To use CrN/SiCN as a material for protective coatings for cutting tools, it is essential to suppress crater wear caused by the diffusion of iron (Fe), the primary element in the work material, into the protective coating. Aluminum (Al) was selected due to its ability to minimize carbide formation through reduction reactions with carbon, and a (Cr₀.₆₉Al₀.₃₁)N/SiCN coating was developed. The indentation hardness (H_IT) and Young's modulus (E_IT) of the as-deposited (Cr₀.₆₉Al₀.₃₁)N/SiCN coating attained maximum values of ∼35 GPa and 340 GPa, respectively. After heat treatment at 1100 K for 1 h in vacuum, the H_IT value improved further. However, after heat treatment at 1100 K for 1 h under atmospheric conditions, the H_IT value showed minimal change compared to that of the as-deposited state. Scanning electron microscopy-energy dispersive X-ray spectrometry (SEM-EDS) analysis, as well as transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) observations, revealed that the (Cr₀.₆₉Al₀.₃₁)N/SiCN coatings exhibited significantly suppressed oxidation and Fe diffusion compared to the CrN/SiCN coatings. In the (Cr₀.₆₉Al₀.₃₁)N/SiCN coatings, even when Fe diffused into the coating, the formation of Fe-Si, Cr-C, and other compounds was minimal, and grain coarsening was negligible. These results suggest that the (Cr₀.₆₉Al₀.₃₁)N/SiCN coating is a promising candidate for protective coatings for cutting tools.

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来源期刊

Thin Solid Films 工程技术-材料科学：膜

CiteScore

4.00

自引率

4.80%

发文量

381

审稿时长

7.5 months

期刊介绍： Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.