采用连续离子层吸附反应技术制备连续超薄层ZnS

IF 2 4区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS

Thin Solid Films Pub Date : 2025-07-30 DOI:10.1016/j.tsf.2025.140754

Eugene Bortchagovsky , Alla Bogoslovska , Dmytro Grynko , Oleksandr Selyshchev , Dietrich R.T. Zahn

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引用次数: 0

摘要

我们证明了冲洗在顺序离子层吸附和反应（SILAR）沉积中的关键作用，这使我们能够获得厚度小于10 nm的连续ZnS层。SILAR是一种低温廉价的工艺，适用于覆盖大面积的平面和不规则表面。SILAR的最初想法是用化学方法取代原子层沉积，使沉积膜的控制保持在类似的单层水平上。不幸的是，SILAR技术的许多应用导致沉积相当厚的薄膜，远离单层控制。我们证明，仔细遵循原始配方可以获得具有单层精度的SILAR沉积。

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Continuous ultrathin layers of ZnS produced by the successive ionic layer adsorption and reaction technique

We demonstrate the pivotal role of rinsing in Sequential Ionic Layer Adsorption and Reaction (SILAR) deposition, which allowed us to obtain continuous layers of ZnS with a thickness below 10 nm. SILAR is a low-temperature inexpensive process suitable to cover large areas of both flat and irregular surfaces. The original idea of SILAR is the substitution of Atomic Layer Deposition by a chemical approach keeping the control of deposited films on a similar monolayer level. Unfortunately, many applications of the SILAR technique result in the deposition of fairly thick films far from monolayer control. We demonstrate that carefully following the original recipe results in SILAR deposition with monolayer accuracy.

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来源期刊

Thin Solid Films 工程技术-材料科学：膜

CiteScore

4.00

自引率

4.80%

发文量

381

审稿时长

7.5 months

期刊介绍： Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.