红外纳秒脉冲激光对单晶金刚石表面变形的建模与实验研究

IF 5 2区 物理与天体物理 Q1 OPTICS
Zhen Zhang , Quanli Zhang , Wentao Wang , Qiwen Wang , Jiuhua Xu
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引用次数: 0

摘要

本文建立了红外脉冲激光烧蚀单晶金刚石表面织构的预测模型。首先,通过实验获得了金刚石的激光烧蚀阈值,并对脉冲激光加工的能量积累效应进行了分析和仿真。通过分析脉冲激光的时间分布函数和离焦变化函数,并考虑烧蚀曲面引起的激光能量密度高度梯度变化,得到了金刚石脉冲激光烧蚀的表面形貌变化函数,实现了线槽阵列、方槽阵列、菱形槽阵列、波槽阵列和圆槽阵列表面织构的数值模拟结果。结果表明:金刚石烧蚀槽实验与仿真结果比较,得到的槽深和槽宽的平均相对误差分别为12%和11.8%。结果表明,数值模拟能较好地预测烧蚀槽型,实现槽型边缘规则、截面轮廓一致的表面织构处理。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modelling and experimental study on surface texturing of single crystalline diamond by infrared nanosecond pulsed laser
In this study, a prediction model of the surface texture of a single crystalline diamond ablated by infrared pulsed laser was established. Firstly, the laser ablation threshold of diamond was obtained through an experiment, and the energy accumulation effect of pulsed laser processing was analysed and simulated. By analysing the time distribution function and defocusing variation function of pulsed laser and by considering the height gradient change of laser energy density caused by the ablation curved surface, the surface morphology change function of diamond pulsed laser ablation was obtained, and the numerical simulation results of the surface texture of linear groove array, square groove array, rhombus groove array, wave groove array and circular groove array were realised. Results showed the groove depth and width, and the average relative error of the two were 12 % and 11.8 %, respectively, which were obtained by comparing the diamond ablation groove experiment with the simulation results. These results indicate that the numerical simulation can achieve a good prediction of the ablation groove profile and realise the surface texture processing with regular groove edges and consistent cross-section profiles.
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来源期刊
CiteScore
8.50
自引率
10.00%
发文量
1060
审稿时长
3.4 months
期刊介绍: Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems
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