Zehou Li , Jun Wang , Liangzheng Ji , Jing Zhang , Yang Liu
{"title":"以典型微型led芯片在激光诱导正向转移过程中的动态行为为例进行研究","authors":"Zehou Li , Jun Wang , Liangzheng Ji , Jing Zhang , Yang Liu","doi":"10.1016/j.optlastec.2025.113411","DOIUrl":null,"url":null,"abstract":"<div><div>In Laser Induced Forward Transfer (LIFT) technology, low transfer yield of micrometer-scale chips, especially with tens of millions, limits Micro-LED large-scale use. Many studies explore LIFT process parameters, but few examine the chip descent process. We analyze this process and find a neglected issue: during LIFT transfer of commercial Micro-LED chips, chips rotate after release from the donor substrate, reducing yield. Our analysis reveals the cause: asymmetric geometry and uneven mass distribution in these chips misalign the geometric center and center of mass, creating torque that drives unavoidable rotation and lowers yield. We propose a fix: adjusting laser fluence and transfer distance, key LIFT parameters, to control chip rotation and improve yield. Tests show slow, manageable rotation at 70mJ/cm<sup>2</sup> fluence and under 100 μm distance. Beyond 100 μm at this fluence, rotation speeds up to 1.2°/μm, raising failure risk. Higher fluence and distance increase rotation, peaking at 2.5°/μm. Optimal parameters for these uneven chips are 70–75mJ laser energy and 80–100 μm transfer distance, achieving industry-standard yields. Our work bridges a gap in prior LIFT process research, explaining why shorter transfer distances improve yield, unresolved in prior studies.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"192 ","pages":"Article 113411"},"PeriodicalIF":5.0000,"publicationDate":"2025-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A case study: dynamic behavior of a typical Micro-LED chips during laser induced forward transfer process\",\"authors\":\"Zehou Li , Jun Wang , Liangzheng Ji , Jing Zhang , Yang Liu\",\"doi\":\"10.1016/j.optlastec.2025.113411\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In Laser Induced Forward Transfer (LIFT) technology, low transfer yield of micrometer-scale chips, especially with tens of millions, limits Micro-LED large-scale use. Many studies explore LIFT process parameters, but few examine the chip descent process. We analyze this process and find a neglected issue: during LIFT transfer of commercial Micro-LED chips, chips rotate after release from the donor substrate, reducing yield. Our analysis reveals the cause: asymmetric geometry and uneven mass distribution in these chips misalign the geometric center and center of mass, creating torque that drives unavoidable rotation and lowers yield. We propose a fix: adjusting laser fluence and transfer distance, key LIFT parameters, to control chip rotation and improve yield. Tests show slow, manageable rotation at 70mJ/cm<sup>2</sup> fluence and under 100 μm distance. Beyond 100 μm at this fluence, rotation speeds up to 1.2°/μm, raising failure risk. Higher fluence and distance increase rotation, peaking at 2.5°/μm. Optimal parameters for these uneven chips are 70–75mJ laser energy and 80–100 μm transfer distance, achieving industry-standard yields. Our work bridges a gap in prior LIFT process research, explaining why shorter transfer distances improve yield, unresolved in prior studies.</div></div>\",\"PeriodicalId\":19511,\"journal\":{\"name\":\"Optics and Laser Technology\",\"volume\":\"192 \",\"pages\":\"Article 113411\"},\"PeriodicalIF\":5.0000,\"publicationDate\":\"2025-06-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics and Laser Technology\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0030399225010023\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Laser Technology","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0030399225010023","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
A case study: dynamic behavior of a typical Micro-LED chips during laser induced forward transfer process
In Laser Induced Forward Transfer (LIFT) technology, low transfer yield of micrometer-scale chips, especially with tens of millions, limits Micro-LED large-scale use. Many studies explore LIFT process parameters, but few examine the chip descent process. We analyze this process and find a neglected issue: during LIFT transfer of commercial Micro-LED chips, chips rotate after release from the donor substrate, reducing yield. Our analysis reveals the cause: asymmetric geometry and uneven mass distribution in these chips misalign the geometric center and center of mass, creating torque that drives unavoidable rotation and lowers yield. We propose a fix: adjusting laser fluence and transfer distance, key LIFT parameters, to control chip rotation and improve yield. Tests show slow, manageable rotation at 70mJ/cm2 fluence and under 100 μm distance. Beyond 100 μm at this fluence, rotation speeds up to 1.2°/μm, raising failure risk. Higher fluence and distance increase rotation, peaking at 2.5°/μm. Optimal parameters for these uneven chips are 70–75mJ laser energy and 80–100 μm transfer distance, achieving industry-standard yields. Our work bridges a gap in prior LIFT process research, explaining why shorter transfer distances improve yield, unresolved in prior studies.
期刊介绍:
Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication.
The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas:
•development in all types of lasers
•developments in optoelectronic devices and photonics
•developments in new photonics and optical concepts
•developments in conventional optics, optical instruments and components
•techniques of optical metrology, including interferometry and optical fibre sensors
•LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow
•applications of lasers to materials processing, optical NDT display (including holography) and optical communication
•research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume)
•developments in optical computing and optical information processing
•developments in new optical materials
•developments in new optical characterization methods and techniques
•developments in quantum optics
•developments in light assisted micro and nanofabrication methods and techniques
•developments in nanophotonics and biophotonics
•developments in imaging processing and systems