以典型微型led芯片在激光诱导正向转移过程中的动态行为为例进行研究

IF 5 2区 物理与天体物理 Q1 OPTICS
Zehou Li , Jun Wang , Liangzheng Ji , Jing Zhang , Yang Liu
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引用次数: 0

摘要

在激光诱导正向转移(LIFT)技术中,微米级芯片尤其是千万级芯片的低转移良率限制了Micro-LED的大规模应用。许多研究探讨了LIFT工艺参数,但很少研究芯片下降过程。我们分析了这一过程,发现了一个被忽视的问题:在商用Micro-LED芯片的LIFT转移过程中,芯片从供体衬底释放后会旋转,从而降低了良率。我们的分析揭示了原因:这些芯片的几何不对称和质量分布不均匀,导致几何中心和质量中心错位,产生扭矩,导致不可避免的旋转,降低了产量。我们提出了一种解决方案:通过调整激光通量和传输距离这两个关键的LIFT参数来控制芯片的旋转,从而提高良率。测试表明,在70mJ/cm2的压力下,在100 μm距离下,旋转缓慢,可控。在超过100 μm的流量下,旋转速度高达1.2°/μm,增加了故障风险。较高的通量和距离增加了旋转,在2.5°/μm处达到峰值。这些不均匀芯片的最佳参数为70-75mJ激光能量和80-100 μm传输距离,达到行业标准的良率。我们的工作弥补了先前LIFT工艺研究的空白,解释了为什么较短的转移距离可以提高收率,这是先前研究中未解决的问题。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A case study: dynamic behavior of a typical Micro-LED chips during laser induced forward transfer process
In Laser Induced Forward Transfer (LIFT) technology, low transfer yield of micrometer-scale chips, especially with tens of millions, limits Micro-LED large-scale use. Many studies explore LIFT process parameters, but few examine the chip descent process. We analyze this process and find a neglected issue: during LIFT transfer of commercial Micro-LED chips, chips rotate after release from the donor substrate, reducing yield. Our analysis reveals the cause: asymmetric geometry and uneven mass distribution in these chips misalign the geometric center and center of mass, creating torque that drives unavoidable rotation and lowers yield. We propose a fix: adjusting laser fluence and transfer distance, key LIFT parameters, to control chip rotation and improve yield. Tests show slow, manageable rotation at 70mJ/cm2 fluence and under 100 μm distance. Beyond 100 μm at this fluence, rotation speeds up to 1.2°/μm, raising failure risk. Higher fluence and distance increase rotation, peaking at 2.5°/μm. Optimal parameters for these uneven chips are 70–75mJ laser energy and 80–100 μm transfer distance, achieving industry-standard yields. Our work bridges a gap in prior LIFT process research, explaining why shorter transfer distances improve yield, unresolved in prior studies.
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来源期刊
CiteScore
8.50
自引率
10.00%
发文量
1060
审稿时长
3.4 months
期刊介绍: Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems
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