Theoretical model of angle-resolved polarized Raman spectroscopy for stress analysis based on coherency matrix

Angle-resolved polarized Raman spectroscopy is extensively used for the decoupling analysis of stress components in semiconductor materials, as well as the identification of crystal orientation and determination of layer numbers in two-dimensional materials. It provides significant advantages for the precise and quantitative characterization of material properties and stress. However, due to the influence of the partially polarized light and the individualized properties of optical components in the Raman optical system, there are discrepancies between the experimental results and the existing theoretical models of angle-resolved polarized Raman spectroscopy. To accurately describe the experimental results using a model, this paper establishes a theoretical model for angle-resolved polarized Raman spectroscopy based on the coherency matrix and Jones matrix method. This model employs the coherency matrix to characterize partially polarized light and introduces calibration parameters to describe the changes of light after passing through optical components, quantitatively analyzing the combined influence of various factors. Consequently, this model can precisely depict the experimental results of angle-resolved polarized Raman spectroscopy and exhibits a more extensive scope of application. Meanwhile, stress analysis is carried out based on the theoretical model to quantitatively analyze the impacts of the individualized parameters of optical components and the changes in polarization degree on the accuracy of stress characterization.