基于s参数测量的频变非周期SAW器件宽带特性研究

IF 2.9 2区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Electron Devices Pub Date : 2025-04-29 DOI:10.1109/TED.2025.3562837

Hansoo Yoo;Yungseon Eo

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引用次数: 0

摘要

研究了具有非周期和不规则光栅结构的表面声波数字间换能器的物理特性。在42°x - litao3（压电衬底）上制造的各种测试SAW IDT器件的s参数使用宽频带的晶圆级去嵌入技术进行测量。非周期或非对称SAW IDT器件物理行为的声波传播模型参数是根据频率变化和光栅布局相关参数确定的，但不是恒定的。结果表明，基于该方法的数值计算与实验数据吻合良好。

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S-Parameter-Measurement-Based Broadband Characterization for Frequency-Variant Aperiodic SAW Devices

The physical characteristics of surface acoustic wave interdigital transducers (SAW IDTs) with aperiodic and irregular grating structures are investigated. S-parameters for various test SAW IDT devices fabricated on 42°YX-LiTaO3 (piezoelectric substrate) are measured using a wafer-level de-embedding technique over a broad frequency band. Acoustic wave propagation model parameters for the physical behavior of aperiodic or asymmetric SAW IDT devices are determined in terms of frequency-variant and grating-layout-dependent parameters but are not constant. It is shown that numerical calculations based on the proposed technique have excellent agreement with experimental data.

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来源期刊

IEEE Transactions on Electron Devices 工程技术-工程：电子与电气

CiteScore

5.80

自引率

16.10%

发文量

937

审稿时长

3.8 months

期刊介绍： IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.