High-Density Sensor Array Based on a-IGZO TFT for Pressure and Light Response

Detection capabilities similar to those of eyeballs and skin, such as pressure and light sensing, are crucial for electronic skins, bionic eyeballs, human-machine interactions, and biomimetic robots. Previous studies have primarily focused on investigating individual physical quantities, while simultaneously mapping these quantities remains challenging. This article introduces a dual-parameter sensor array based on amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs). The array is capable of simultaneously and independently detecting pressure (106.9 kPa ${}^{-{1}}$ , ranging from 0.5 to 10 kPa) and ultraviolet (UV) light (0.5 ( $\mu $ W/cm2) ${}^{-{1}}$ , ranging from 0 to $76~\mu $ W/cm2). The pressure detection is achieved through a patterned conductive film connected to the source electrode of the TFTs, while the UV light is detected by photogenerated electron-hole pairs in the a-IGZO channel. Integration of TFTs increase the spatial resolution of both the pressure and light sensor array to 128 pixels per square centimeter (PPSC). The development of this dual-parameter high-density sensor array holds profound significance for applications in biomimetic eyeballs and electronic skin, such as texture and shape recognition.