湿蚀刻辅助飞秒激光直写技术在氟碲玻璃上制备红外微透镜阵列

IF 4.6 2区物理与天体物理 Q1 OPTICS

Optics and Laser Technology Pub Date : 2025-05-27 DOI:10.1016/j.optlastec.2025.113231

Xianda Li , Feng Liu , Rui Wan , Weinan Li , Pengfei Wang

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引用次数: 0

摘要

本文报道了用湿蚀刻辅助飞秒激光烧蚀法在氟碲酸盐玻璃上制备红外微透镜阵列（MLA）。研究了激光诱导氟碲酸盐玻璃表面结构随脉冲能量和脉冲数的变化规律。随后，证明了这些激光诱导结构引起的各向异性刻蚀。通过优化酸蚀时间、氢氟酸（HF）溶液浓度和激光诱导烧蚀参数，得到了数值孔径（NA）在0.24 ~ 0.45之间的微透镜。最后，我们在氟碲酸盐玻璃衬底上制备了填充率超过97.1%、间距为80µm、焦距为98µm、NA为0.41、总面积为18.94 mm2的MLA。聚焦、成像和光均匀化测试证明获得了功能性的MLA结构。这些特征表明，氟碲酸盐玻璃上的MLA在红外微光学系统中具有很大的应用潜力。

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Fabrication of an infrared microlens array on fluorotellurite glass via wet etching-assisted femtosecond laser direct writing

We report the fabrication of an infrared microlens array (MLA) on fluorotellurite glass via wet etching-assisted femtosecond (fs) laser ablation method. The evolution of fs laser-induced structures on the surface of fluorotellurite glass with pulse energy and pulse number was studied. Subsequently, anisotropic etching induced by these laser-induced structures was demonstrated. By optimizing the acid etching time, the concentration of the hydrofluoric (HF) solution and laser-induced ablation parameters, microlenses with numerical aperture (NA) varying from 0.24 to 0.45 were obtained. Finally, we fabricated an MLA with over 97.1 % filling ratio, an interval of 80 µm, focal length of 98 µm, NA of 0.41 and total area of 18.94 mm² on fluorotellurite glass substrate. Focusing, imaging and light homogenization tests proved that functional MLA structures were obtained. These features indicate that the MLA on fluorotellurite glass has great potential for applications in infrared micro-optical systems.

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来源期刊

Optics and Laser Technology 物理-光学

CiteScore

8.50

自引率

10.00%

发文量

1060

审稿时长

3.4 months

期刊介绍： Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems