{"title":"具有本地nand门和隔离方案的4F²1T1R RRAM的研究进展","authors":"Shengyu Bao;Zongwei Wang;Yuhang Yang;Qishen Wang;Linbo Shan;Lin Bao;Yimao Cai;Ru Huang","doi":"10.1109/TED.2025.3554165","DOIUrl":null,"url":null,"abstract":"In this work, we introduce an innovative <sc>nand</small>-gate array structure that optimizes cell density through local series connection. By implementing a p-well isolation in combination with the substrate bias effect, we effectively mitigate the operating voltage constraints on series-connected cells. This design ensures symmetric read operations and maintains uniform read margins among cells in the <sc>nand</small>-gate array, achieving a record cell size of <inline-formula> <tex-math>$0.045~\\mu $ </tex-math></inline-formula> m2 at the 40-nm technology node. This design demonstrates robust reliability with an endurance of 100k cycles and a ten-year retention at 150 ° C. Moreover, the implementation of deep trench isolation (DTI) technology enables further density enhancements, with a projected cell area of <inline-formula> <tex-math>$0.0255~\\mu $ </tex-math></inline-formula> m2 at the 28-nm technology node. This approach offers significant advancements in resistive random access memory (RRAM) density, making it highly suitable for high-density memory and computing applications.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":"72 5","pages":"2327-2333"},"PeriodicalIF":2.9000,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Advancing Toward 4F² 1T1R RRAM With Local NAND-gate and Isolation Scheme\",\"authors\":\"Shengyu Bao;Zongwei Wang;Yuhang Yang;Qishen Wang;Linbo Shan;Lin Bao;Yimao Cai;Ru Huang\",\"doi\":\"10.1109/TED.2025.3554165\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we introduce an innovative <sc>nand</small>-gate array structure that optimizes cell density through local series connection. By implementing a p-well isolation in combination with the substrate bias effect, we effectively mitigate the operating voltage constraints on series-connected cells. This design ensures symmetric read operations and maintains uniform read margins among cells in the <sc>nand</small>-gate array, achieving a record cell size of <inline-formula> <tex-math>$0.045~\\\\mu $ </tex-math></inline-formula> m2 at the 40-nm technology node. This design demonstrates robust reliability with an endurance of 100k cycles and a ten-year retention at 150 ° C. Moreover, the implementation of deep trench isolation (DTI) technology enables further density enhancements, with a projected cell area of <inline-formula> <tex-math>$0.0255~\\\\mu $ </tex-math></inline-formula> m2 at the 28-nm technology node. This approach offers significant advancements in resistive random access memory (RRAM) density, making it highly suitable for high-density memory and computing applications.\",\"PeriodicalId\":13092,\"journal\":{\"name\":\"IEEE Transactions on Electron Devices\",\"volume\":\"72 5\",\"pages\":\"2327-2333\"},\"PeriodicalIF\":2.9000,\"publicationDate\":\"2025-04-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Electron Devices\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10948340/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Electron Devices","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10948340/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Advancing Toward 4F² 1T1R RRAM With Local NAND-gate and Isolation Scheme
In this work, we introduce an innovative nand-gate array structure that optimizes cell density through local series connection. By implementing a p-well isolation in combination with the substrate bias effect, we effectively mitigate the operating voltage constraints on series-connected cells. This design ensures symmetric read operations and maintains uniform read margins among cells in the nand-gate array, achieving a record cell size of $0.045~\mu $ m2 at the 40-nm technology node. This design demonstrates robust reliability with an endurance of 100k cycles and a ten-year retention at 150 ° C. Moreover, the implementation of deep trench isolation (DTI) technology enables further density enhancements, with a projected cell area of $0.0255~\mu $ m2 at the 28-nm technology node. This approach offers significant advancements in resistive random access memory (RRAM) density, making it highly suitable for high-density memory and computing applications.
期刊介绍:
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.