{"title":"高能量分辨率软x射线发射光谱仪，采用后薄型CMOS探测器，用于化学键态分析。","authors":"Shogo Koshiya, Takanori Murano, Masami Terauchi","doi":"10.1093/jmicro/dfaf021","DOIUrl":null,"url":null,"abstract":"<p><p>Improvement of a commercially available soft X-ray emission spectrometer was tested by introducing a fine-pixel-sized CMOS detector. The peak width of Mg Kα-emission was reduced to 1/4 of that obtained by the CCD detector presently used. Furthermore, the differences in the energy positions of satellite lines of Mg Kα- and also Kβ-emission profiles of Mg and MgO were observed. O K-emission profile of MgO exhibited a few structures reflecting the chemical bonding state. This spectrometer easily discriminated the intensity profiles of Fe Lα,β-emission reflecting the chemical bonding states of Fe atoms in Fe, FeO, Fe3O4, and Fe2O3.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":""},"PeriodicalIF":1.9000,"publicationDate":"2025-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High energy-resolution soft X-ray emission spectrometer using a back-thinned CMOS detector for chemical bonding state analysis.\",\"authors\":\"Shogo Koshiya, Takanori Murano, Masami Terauchi\",\"doi\":\"10.1093/jmicro/dfaf021\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Improvement of a commercially available soft X-ray emission spectrometer was tested by introducing a fine-pixel-sized CMOS detector. The peak width of Mg Kα-emission was reduced to 1/4 of that obtained by the CCD detector presently used. Furthermore, the differences in the energy positions of satellite lines of Mg Kα- and also Kβ-emission profiles of Mg and MgO were observed. O K-emission profile of MgO exhibited a few structures reflecting the chemical bonding state. This spectrometer easily discriminated the intensity profiles of Fe Lα,β-emission reflecting the chemical bonding states of Fe atoms in Fe, FeO, Fe3O4, and Fe2O3.</p>\",\"PeriodicalId\":74193,\"journal\":{\"name\":\"Microscopy (Oxford, England)\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2025-04-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microscopy (Oxford, England)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1093/jmicro/dfaf021\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microscopy (Oxford, England)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1093/jmicro/dfaf021","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
通过引入细像素级CMOS探测器，测试了商用软x射线发射光谱仪的改进。Mg - k - α-发射峰宽减小到现有CCD探测器的1/4。此外，还观察到Mg和MgO的Kα-和k β-发射谱线能量位置的差异。MgO的O - k发射谱显示出一些反映化学键态的结构。该光谱仪可以很容易地分辨出Fe、FeO、Fe3O4和Fe2O3中Fe原子的化学键态的Lα、β-发射强度谱。
High energy-resolution soft X-ray emission spectrometer using a back-thinned CMOS detector for chemical bonding state analysis.
Improvement of a commercially available soft X-ray emission spectrometer was tested by introducing a fine-pixel-sized CMOS detector. The peak width of Mg Kα-emission was reduced to 1/4 of that obtained by the CCD detector presently used. Furthermore, the differences in the energy positions of satellite lines of Mg Kα- and also Kβ-emission profiles of Mg and MgO were observed. O K-emission profile of MgO exhibited a few structures reflecting the chemical bonding state. This spectrometer easily discriminated the intensity profiles of Fe Lα,β-emission reflecting the chemical bonding states of Fe atoms in Fe, FeO, Fe3O4, and Fe2O3.
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