“理解高分辨率50kv电子束光刻在厚抗蚀剂层上的剂量校正”的勘误表[微纳米工程卷16，August 2022, 100141]

{"title":"“理解高分辨率50kv电子束光刻在厚抗蚀剂层上的剂量校正”的勘误表[微纳米工程卷16，August 2022, 100141]","authors":"Mattias Åstrand, Thomas Frisk, Hanna Ohlin, Ulrich Vogt","doi":"10.1016/j.mne.2025.100297","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"26 ","pages":"Article 100297"},"PeriodicalIF":3.1000,"publicationDate":"2025-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Corrigendum to “Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers” [Micro and Nano Engineering Volume 16, August 2022, 100141]\",\"authors\":\"Mattias Åstrand, Thomas Frisk, Hanna Ohlin, Ulrich Vogt\",\"doi\":\"10.1016/j.mne.2025.100297\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":37111,\"journal\":{\"name\":\"Micro and Nano Engineering\",\"volume\":\"26 \",\"pages\":\"Article 100297\"},\"PeriodicalIF\":3.1000,\"publicationDate\":\"2025-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nano Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2590007225000036\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nano Engineering","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2590007225000036","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}