半导体封装材料机械和粘附性能测试方法综述

Seung Jin Oh;Jae Hak Lee;Seung Man Kim;Seongheum Han;Ah-Young Park;Hyunkyu Moon;Jun-Yeob Song
{"title":"半导体封装材料机械和粘附性能测试方法综述","authors":"Seung Jin Oh;Jae Hak Lee;Seung Man Kim;Seongheum Han;Ah-Young Park;Hyunkyu Moon;Jun-Yeob Song","doi":"10.1109/TMAT.2025.3561740","DOIUrl":null,"url":null,"abstract":"Mechanical testing methodologies are essential for advancing semiconductor packaging processes, ensuring the mechanical reliability of devices subjected to increasingly complex manufacturing processes and operational conditions. In recent years, advanced packaging technologies, including system-in-package (SiP) using 2.xD and 3D integration, have played a crucial role in enabling high-performance electronic devices. However, the miniaturization of device structures and integration of materials with mismatched thermomechanical properties have introduced significant mechanical challenges, including warpage, interfacial delamination, and fracture-induced failures. This review comprehensively evaluates key mechanical testing methodologies used to characterize the material properties and interfacial reliability of materials in semiconductor packages. Techniques such as the tensile test and double-cantilever beam (DCB) test are critically examined, with a focus on their effectiveness in assessing thin-film mechanical behavior, adhesion properties, and fracture mechanisms in miniaturized semiconductor structures. Furthermore, this review highlights the limitations of traditional testing techniques in micro- and nanoscale applications and explores emerging testing approaches. By providing a comparative analysis of mechanical testing techniques and their applications in semiconductor packaging, this work aims to provide insights for optimizing reliability evaluation strategies and guiding future developments in advanced packaging technologies.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"2 ","pages":"49-63"},"PeriodicalIF":0.0000,"publicationDate":"2025-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Overview of Testing Methods for Mechanical and Adhesion Properties of Materials in Semiconductor Packages\",\"authors\":\"Seung Jin Oh;Jae Hak Lee;Seung Man Kim;Seongheum Han;Ah-Young Park;Hyunkyu Moon;Jun-Yeob Song\",\"doi\":\"10.1109/TMAT.2025.3561740\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Mechanical testing methodologies are essential for advancing semiconductor packaging processes, ensuring the mechanical reliability of devices subjected to increasingly complex manufacturing processes and operational conditions. In recent years, advanced packaging technologies, including system-in-package (SiP) using 2.xD and 3D integration, have played a crucial role in enabling high-performance electronic devices. However, the miniaturization of device structures and integration of materials with mismatched thermomechanical properties have introduced significant mechanical challenges, including warpage, interfacial delamination, and fracture-induced failures. This review comprehensively evaluates key mechanical testing methodologies used to characterize the material properties and interfacial reliability of materials in semiconductor packages. Techniques such as the tensile test and double-cantilever beam (DCB) test are critically examined, with a focus on their effectiveness in assessing thin-film mechanical behavior, adhesion properties, and fracture mechanisms in miniaturized semiconductor structures. Furthermore, this review highlights the limitations of traditional testing techniques in micro- and nanoscale applications and explores emerging testing approaches. By providing a comparative analysis of mechanical testing techniques and their applications in semiconductor packaging, this work aims to provide insights for optimizing reliability evaluation strategies and guiding future developments in advanced packaging technologies.\",\"PeriodicalId\":100642,\"journal\":{\"name\":\"IEEE Transactions on Materials for Electron Devices\",\"volume\":\"2 \",\"pages\":\"49-63\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2025-04-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Materials for Electron Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10967074/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Materials for Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/10967074/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

机械测试方法对于推进半导体封装工艺至关重要,确保设备在日益复杂的制造工艺和操作条件下的机械可靠性。近年来,先进的封装技术,包括系统级封装(SiP)的使用。xD和3D集成,在实现高性能电子设备方面发挥了至关重要的作用。然而,器件结构的小型化和热机械性能不匹配的材料集成带来了重大的机械挑战,包括翘曲、界面分层和断裂诱发失效。本文全面评估了用于表征半导体封装材料性能和界面可靠性的关键机械测试方法。拉伸测试和双悬臂梁(DCB)测试等技术进行了严格的研究,重点是它们在评估小型化半导体结构中的薄膜力学行为、粘附性能和断裂机制方面的有效性。此外,本文强调了传统测试技术在微纳米级应用中的局限性,并探讨了新兴的测试方法。通过对机械测试技术及其在半导体封装中的应用进行比较分析,本工作旨在为优化可靠性评估策略和指导先进封装技术的未来发展提供见解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Overview of Testing Methods for Mechanical and Adhesion Properties of Materials in Semiconductor Packages
Mechanical testing methodologies are essential for advancing semiconductor packaging processes, ensuring the mechanical reliability of devices subjected to increasingly complex manufacturing processes and operational conditions. In recent years, advanced packaging technologies, including system-in-package (SiP) using 2.xD and 3D integration, have played a crucial role in enabling high-performance electronic devices. However, the miniaturization of device structures and integration of materials with mismatched thermomechanical properties have introduced significant mechanical challenges, including warpage, interfacial delamination, and fracture-induced failures. This review comprehensively evaluates key mechanical testing methodologies used to characterize the material properties and interfacial reliability of materials in semiconductor packages. Techniques such as the tensile test and double-cantilever beam (DCB) test are critically examined, with a focus on their effectiveness in assessing thin-film mechanical behavior, adhesion properties, and fracture mechanisms in miniaturized semiconductor structures. Furthermore, this review highlights the limitations of traditional testing techniques in micro- and nanoscale applications and explores emerging testing approaches. By providing a comparative analysis of mechanical testing techniques and their applications in semiconductor packaging, this work aims to provide insights for optimizing reliability evaluation strategies and guiding future developments in advanced packaging technologies.
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