R.M.R. Kubica , A. Albouy , M. Le Cocq , F. Gonzatti , F. Balestra , P. Leduc
{"title":"微辐射热计用外延p+pn+垂直短二极管","authors":"R.M.R. Kubica , A. Albouy , M. Le Cocq , F. Gonzatti , F. Balestra , P. Leduc","doi":"10.1016/j.sse.2025.109123","DOIUrl":null,"url":null,"abstract":"<div><div>In the LWIR band, pn diodes are an attractive solution for thermometers in microbolometers. In this paper, epitaxial short <span><math><mrow><msup><mrow><mi>p</mi></mrow><mrow><mo>+</mo></mrow></msup><mi>p</mi><msup><mrow><mi>n</mi></mrow><mrow><mo>+</mo></mrow></msup></mrow></math></span> diodes were studied at 303–343 K. A <span><math><mrow><mi>T</mi><mi>C</mi><mi>C</mi></mrow></math></span> ranging from 8 %.K<span><math><msup><mrow></mrow><mrow><mo>−</mo><mn>1</mn></mrow></msup></math></span> to 3 %.K<span><math><msup><mrow></mrow><mrow><mo>−</mo><mn>1</mn></mrow></msup></math></span> between 0.2 V and 0.8 V and a current noise dominated by flicker noise were measured. Finally, at 303 K and an integration time of 40 ms, a thermal resolution ranging from 5.10<span><math><msup><mrow></mrow><mrow><mo>−</mo><mn>2</mn></mrow></msup></math></span> K to <span><math><mrow><mn>1</mn><mo>.</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>4</mn></mrow></msup></mrow></math></span> K was obtained for bias currents between <span><math><mrow><mn>5</mn><mo>.</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>11</mn></mrow></msup></mrow></math></span> A and <span><math><mrow><mn>2</mn><mo>.</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>2</mn></mrow></msup></mrow></math></span> A.</div></div>","PeriodicalId":21909,"journal":{"name":"Solid-state Electronics","volume":"228 ","pages":"Article 109123"},"PeriodicalIF":1.4000,"publicationDate":"2025-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Epitaxial p+pn+ vertical short diodes for microbolometers\",\"authors\":\"R.M.R. Kubica , A. Albouy , M. Le Cocq , F. Gonzatti , F. Balestra , P. Leduc\",\"doi\":\"10.1016/j.sse.2025.109123\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In the LWIR band, pn diodes are an attractive solution for thermometers in microbolometers. In this paper, epitaxial short <span><math><mrow><msup><mrow><mi>p</mi></mrow><mrow><mo>+</mo></mrow></msup><mi>p</mi><msup><mrow><mi>n</mi></mrow><mrow><mo>+</mo></mrow></msup></mrow></math></span> diodes were studied at 303–343 K. A <span><math><mrow><mi>T</mi><mi>C</mi><mi>C</mi></mrow></math></span> ranging from 8 %.K<span><math><msup><mrow></mrow><mrow><mo>−</mo><mn>1</mn></mrow></msup></math></span> to 3 %.K<span><math><msup><mrow></mrow><mrow><mo>−</mo><mn>1</mn></mrow></msup></math></span> between 0.2 V and 0.8 V and a current noise dominated by flicker noise were measured. Finally, at 303 K and an integration time of 40 ms, a thermal resolution ranging from 5.10<span><math><msup><mrow></mrow><mrow><mo>−</mo><mn>2</mn></mrow></msup></math></span> K to <span><math><mrow><mn>1</mn><mo>.</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>4</mn></mrow></msup></mrow></math></span> K was obtained for bias currents between <span><math><mrow><mn>5</mn><mo>.</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>11</mn></mrow></msup></mrow></math></span> A and <span><math><mrow><mn>2</mn><mo>.</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>2</mn></mrow></msup></mrow></math></span> A.</div></div>\",\"PeriodicalId\":21909,\"journal\":{\"name\":\"Solid-state Electronics\",\"volume\":\"228 \",\"pages\":\"Article 109123\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2025-05-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Solid-state Electronics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0038110125000681\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solid-state Electronics","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0038110125000681","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Epitaxial p+pn+ vertical short diodes for microbolometers
In the LWIR band, pn diodes are an attractive solution for thermometers in microbolometers. In this paper, epitaxial short diodes were studied at 303–343 K. A ranging from 8 %.K to 3 %.K between 0.2 V and 0.8 V and a current noise dominated by flicker noise were measured. Finally, at 303 K and an integration time of 40 ms, a thermal resolution ranging from 5.10 K to K was obtained for bias currents between A and A.
期刊介绍:
It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.