基于电子束光刻技术的4.15 GHz超高频石英谐振器

IF 4.1 2区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Electron Device Letters Pub Date : 2025-03-06 DOI:10.1109/LED.2025.3548700

Zhichao Yang;Yahui Tian;Qiaozhen Zhang;Lirong Qian

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引用次数: 0

摘要

石英谐振器由于其卓越的频率稳定性、高质量因数和优异的温度稳定性，已广泛应用于通信、电子、航空航天和国防等领域。为了满足日益增长的发展需求，需要更高的谐振器。本文利用复合优化算法设计了中心频率为4.15GHz的超高频石英谐振器，并利用电子束光刻技术成功制造了该器件。扫描电子显微镜（SEM）表征结果表明，尽管存在部分损耗缺陷，器件仍保持相对平坦和光滑。该设备的最小指宽约为207nm。s参数测量结果表明，该超高频谐振器的Q值可达842.7。超高频谐振器的成功为其在高频领域的应用奠定了基础，也为超高频石英谐振器的未来研究和开发提供了参考。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A 4.15 GHz Super High Frequency Quartz Resonator Based on Electron-Beam Lithography

Quartz resonators have been widely used in fields such as communications, electronics, aerospace, and national defense due to their exceptional frequency stability, high-quality factor, and excellent temperature stability. To meet the demand for growing development, higher resonators are needed. This letter utilizes a compound optimization algorithm to design a super high frequency quartz resonator with a center frequency of 4.15GHz and successfully fabricates the device using electron beam lithography. Scanning electron microscopy (SEM) characterization results show that the device remains relatively flat and smooth despite partial loss defects. The minimum finger width of the device is about 207 nm. Measured S-parameter results showed that the Q of this super high-frequency resonator can reach 842.7. The successful super high frequency resonator lays a foundation for its application in the high-frequency field and also provides a reference for future research and development of super high frequency quartz resonators.

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来源期刊

IEEE Electron Device Letters 工程技术-工程：电子与电气

CiteScore

8.20

自引率

10.20%

发文量

551

审稿时长

1.4 months

期刊介绍： IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.