Nguyen Van Toan , Ngoc Dang Khoa Tran , Truong Thi Kim Tuoi , Suhana Mohd Said , Mohd Faizul Mohd Sabri , Takahito Ono
{"title":"金属辅助化学蚀刻纳米工程硅材料的热能收集","authors":"Nguyen Van Toan , Ngoc Dang Khoa Tran , Truong Thi Kim Tuoi , Suhana Mohd Said , Mohd Faizul Mohd Sabri , Takahito Ono","doi":"10.1016/j.mssp.2025.109622","DOIUrl":null,"url":null,"abstract":"<div><div>Low-thermal heat waste energy harvesting represents a transformative technology for powering wireless sensing networks and electronic devices, particularly in remote and challenging environments. This review comprehensively examines the utilization of nanoporous silicon materials for thermal energy harvesting applications, focusing on their fabrication through metal-assisted chemical etching (MACE) and their unique properties that enhance energy conversion efficiency. The high surface area-to-volume ratio of nanoporous silicon significantly improves heat interaction and thermal-to-electrical energy conversion. We analyze the material properties and fabrication methods of nanoporous silicon, providing detailed evaluation of its performance in thermal energy harvesting applications. Experimental data demonstrates that nanoporous silicon achieves thermoelectric figures of merit (ZT) comparable to traditional materials while offering environmental and economic advantages. The review presents two innovative approaches for thermoelectric generators: solid-state configurations and ionic liquid implementations. Through systematic material evaluation and application demonstrations, we establish nanoporous silicon as an efficient and environmentally friendly solution for thermal energy harvesting. Our findings indicate that nanoporous silicon not only addresses the limitations of conventional thermoelectric materials but also provides a scalable and sustainable approach for enhancing energy harvesting system performance. This research contributes to advancing sustainable energy technologies and improving the viability of wireless sensing networks across various environmental conditions.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"195 ","pages":"Article 109622"},"PeriodicalIF":4.2000,"publicationDate":"2025-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanoengineering silicon materials by metal-assisted chemical etching for thermal energy harvesting\",\"authors\":\"Nguyen Van Toan , Ngoc Dang Khoa Tran , Truong Thi Kim Tuoi , Suhana Mohd Said , Mohd Faizul Mohd Sabri , Takahito Ono\",\"doi\":\"10.1016/j.mssp.2025.109622\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Low-thermal heat waste energy harvesting represents a transformative technology for powering wireless sensing networks and electronic devices, particularly in remote and challenging environments. This review comprehensively examines the utilization of nanoporous silicon materials for thermal energy harvesting applications, focusing on their fabrication through metal-assisted chemical etching (MACE) and their unique properties that enhance energy conversion efficiency. The high surface area-to-volume ratio of nanoporous silicon significantly improves heat interaction and thermal-to-electrical energy conversion. We analyze the material properties and fabrication methods of nanoporous silicon, providing detailed evaluation of its performance in thermal energy harvesting applications. Experimental data demonstrates that nanoporous silicon achieves thermoelectric figures of merit (ZT) comparable to traditional materials while offering environmental and economic advantages. The review presents two innovative approaches for thermoelectric generators: solid-state configurations and ionic liquid implementations. Through systematic material evaluation and application demonstrations, we establish nanoporous silicon as an efficient and environmentally friendly solution for thermal energy harvesting. Our findings indicate that nanoporous silicon not only addresses the limitations of conventional thermoelectric materials but also provides a scalable and sustainable approach for enhancing energy harvesting system performance. This research contributes to advancing sustainable energy technologies and improving the viability of wireless sensing networks across various environmental conditions.</div></div>\",\"PeriodicalId\":18240,\"journal\":{\"name\":\"Materials Science in Semiconductor Processing\",\"volume\":\"195 \",\"pages\":\"Article 109622\"},\"PeriodicalIF\":4.2000,\"publicationDate\":\"2025-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Science in Semiconductor Processing\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1369800125003592\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science in Semiconductor Processing","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1369800125003592","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Nanoengineering silicon materials by metal-assisted chemical etching for thermal energy harvesting
Low-thermal heat waste energy harvesting represents a transformative technology for powering wireless sensing networks and electronic devices, particularly in remote and challenging environments. This review comprehensively examines the utilization of nanoporous silicon materials for thermal energy harvesting applications, focusing on their fabrication through metal-assisted chemical etching (MACE) and their unique properties that enhance energy conversion efficiency. The high surface area-to-volume ratio of nanoporous silicon significantly improves heat interaction and thermal-to-electrical energy conversion. We analyze the material properties and fabrication methods of nanoporous silicon, providing detailed evaluation of its performance in thermal energy harvesting applications. Experimental data demonstrates that nanoporous silicon achieves thermoelectric figures of merit (ZT) comparable to traditional materials while offering environmental and economic advantages. The review presents two innovative approaches for thermoelectric generators: solid-state configurations and ionic liquid implementations. Through systematic material evaluation and application demonstrations, we establish nanoporous silicon as an efficient and environmentally friendly solution for thermal energy harvesting. Our findings indicate that nanoporous silicon not only addresses the limitations of conventional thermoelectric materials but also provides a scalable and sustainable approach for enhancing energy harvesting system performance. This research contributes to advancing sustainable energy technologies and improving the viability of wireless sensing networks across various environmental conditions.
期刊介绍:
Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.
Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.
Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.