Research on the rigid preparation method of flexible micro coils for flexible self powered electrical devices using laser cutting technology

With the increase of miniaturization degree, integration degree and application environment requirements of electronic devices, the research on flexible electronic devices becomes extremely urgent. Flexible self-powered devices with good environmental adaptability, continuous energy supply, high mechanical and deformation stability, and environmental friendliness are considered as promising alternatives to conventional batteries. And the preparation of stable and high-performance flexible coils applied to flexible self-powered devices is a great challenge. Herein, a numerical simulation and processing method based on laser cutting technology for the rigid preparation of flexible coils is proposed for magnetostrictive flexible self-powered devices. Three different laser cutting models were set up to analyze the effects of key process parameters. Influence patterns of key process parameters were analyzed. When the laser pulse frequencies are 30 kHz-40 kHz, the laser cutting speeds are 300 mm/s-500 mm/s and the processing times are 6 times-8 times, coils have excellent morphology. Orthogonal experiments were designed to analyze the effects of three process parameters, including laser pulse frequency, laser cutting speed and number of processing times on three process responses including kerf width, kerf roughness, and depth of cut. The significance of the effects and the optimal parameter values (Lp = 40 kHz, Ls = 161 mm/s, P = 6times) were obtained by ANOVA and quadratic regression modeling of the parameters fitted to 90 groups of independent experiments. Rigid preparation combined with flexible transfer has completed the preparation of single-layer flexible coils. Results of bending deformation stability test of the flexible coil show that the resistance value of the coil remained stable after 2000 times of bending test. Double-layer flexible coils were prepared for electrical signal acceptance testing. The flexible coils in the magnetostrictive flexible self-powered device have excellent reception of electrical signals at different vibration frequencies. The results show the wide potential of the prepared flexible coils for application in flexible self-powered applications.