结合斑点图像去噪网络和匈牙利匹配算法：实现非球面形貌的高精度测量

IF 4.6 2区物理与天体物理 Q1 OPTICS

Optics and Laser Technology Pub Date : 2025-04-18 DOI:10.1016/j.optlastec.2025.112970

Meiyun Chen , Huawen Zheng , Haima Yang , Wenchao Ding , Dawei Zhang

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引用次数: 0

摘要

非球面透镜的三维表面形貌测量在光学计量领域具有重要意义。针对自主开发的多光束角度传感器（MBAS）在检测非球面光学元件时面临的两个主要挑战：复杂的背景噪声干扰和检测范围内的子光斑偏差。为了克服这些挑战，提出了一种将点图像去噪和恢复网络（SIDRNet）与匈牙利匹配算法相结合的解决方案。SIDRNet使用去噪和恢复技术处理斑点图像，并结合高斯拟合方法精确定位斑点中心。匈牙利匹配算法有效地扩展了MBAS的动态检测范围，实现了各子点的快速匹配。实验结果表明，该组合方法能有效去除噪声干扰，恢复斑点信息，并能准确匹配各子斑点，进一步提高了MBAS的动态检测范围。在测量不同曲率半径的非球面透镜时，测得的标准偏差（STD）可低至0.0026μm。

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Combining spot image denoising network and Hungarian matching algorithm: Achieving high-precision measurement of aspherical morphology

The three-dimensional surface morphology measurement of aspherical lenses holds significant importance in the field of optical metrology. This study addresses two major challenges faced by a self-developed Multi-Beam Angle Sensor (MBAS) when inspecting aspherical optical elements: complex background noise interference and sub-spot deviation from the detection range. To overcome these challenges, a solution combining a Spot Image Denoising and Restoration Network (SIDRNet) with the Hungarian matching algorithm is proposed. SIDRNet processes spot images using denoising and restoration techniques, combined with a Gaussian fitting method for precise localization of spot centers. The Hungarian matching algorithm effectively expands the dynamic detection range of MBAS and enables rapid matching of each sub-spot. Experimental results demonstrate that this combined method can significantly remove noise interference, restore spot information, and accurately match each sub-spot, further enhancing the dynamic detection range of MBAS. When measuring aspherical lenses with different radii of curvature, the obtained standard deviation (STD) is as low as

0.0026 μ m

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来源期刊

Optics and Laser Technology 物理-光学

CiteScore

8.50

自引率

10.00%

发文量

1060

审稿时长

3.4 months

期刊介绍： Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems