漂移区长度对LDMOSFET总电离剂量效应的影响

IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Shun Li, Hongliang Lu, Jing Qiao, Ruxue Yao, Yutao Zhang, Yuming Zhang
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引用次数: 0

摘要

漂移区长度的调整增加了横向扩散金属氧化物半导体场效应晶体管(LDMOSFET)击穿电压和导通电阻等特性的设计灵活性。然而,它对装置的总电离剂量(TID)效应的影响不容忽视。研究了两种不同漂移区长度的n沟道LDMOSFET (NLDMOSFET)在TID辐照后阈值电压(Vth)、跨导(gm)、漏极电流(Id)和导通电阻(Ron)的变化。我们发现两种器件辐照后Vth和gm的位移几乎相同,而Id和Ron的位移有明显差异。利用计算机辅助设计(TCAD)技术讨论了栅极氧化物和场氧化中的陷阱和界面态对器件特性的影响。最终,我们发现辐照后Vth的降解主要与栅极氧化物有关,而辐照后线性区漏极电流(Idlin)的降解主要与漂移区有关。gm和Ron的降解与Vth和Id的降解有关。虽然长漂移区有利于LDMOS器件的击穿和功率特性,但它会导致TID效应的显著恶化,这在辐射环境下应用的器件和电路设计中值得考虑。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The impact of drift region length on total ionizing dose effects on LDMOSFET
The adjustment of drift region length increases the design flexibility of laterally diffused metal oxide semiconductor field effect transistor (LDMOSFET) characteristics, such as breakdown voltage and on-resistance. However, its impact on the total ionizing dose (TID) effects on the device cannot be ignored. The changes in threshold voltage (Vth), transconductance (gm), drain current (Id), and on-resistance (Ron) of N-channel LDMOSFET (NLDMOSFET) with two different drift region lengths after TID irradiation were studied in this article. We found that the shift of Vth and gm after irradiation was almost identical for both devices, whereas there was a noticeable difference in the shift of Id and Ron. The influences of traps and interface states in gate oxide and field oxide on device characteristics were discussed through technology computer-aided design (TCAD). Ultimately, we discovered that the degradation of Vth after irradiation was primarily related to the gate oxide, while the degradation of drain current in linear region (Idlin) after irradiation was mainly related to the drift region. The degradation of gm and Ron were related to the degradation of Vth and Id. Although the long drift region is beneficial to the breakdown and power characteristics of LDMOS devices, it causes a significant deterioration in the TID effect, which is worth considering in the design of devices and circuits applied in radiation environment.
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来源期刊
Solid-state Electronics
Solid-state Electronics 物理-工程:电子与电气
CiteScore
3.00
自引率
5.90%
发文量
212
审稿时长
3 months
期刊介绍: It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.
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