Au衬底晶体结构对WBG封装中Ag-Au互扩散的影响

IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Bowen Zhang;Zhiheng Gao;Zhiyuan Zhao;Yi Liu;Daohang Li;Yun-Hui Mei
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引用次数: 0

摘要

Ag-Au的快速扩散通常会导致弱界面连接,这严重影响了宽带隙器件的稳定性。因此,原子尺度上的互扩散机制是有效抑制过度互扩散,最终实现坚固接头的关键。本文采用不同晶体结构的Au衬底制备了模贴样品,样品I和样品II的抗剪强度分别达到43.5和34.4 MPa。随后的晶体结构分析证实,烧结后的样品I具有较高的界面连接率(ICR)为47%,Ag-Au互扩散厚度为0.2~\mu $ m,有利于高质量的键合。与样品II(~82.3%)相比,样品I中相对较低的高角晶界比例(~81%)抑制了相互扩散,有利于提高抗剪强度。最后,采用分子动力学模拟(mds)来更好地了解样品I和样品II之间的性能差异。模拟结果表明,在晶粒尺寸小、晶界角大、Au(111)面比例高、烧结温度高的Au衬底上容易发生互扩散过程。所提出的互扩散机制有利于通过烧结银浆和Au金属化衬底形成模附,提高了WBG器件封装的可靠性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of Au Substrate Crystal Structure on Ag–Au Interdiffusion for WBG Packaging
The rapid diffusion of Ag–Au usually results in weak interface joints, which significantly impacts the stability of wide bandgap (WBG) devices. Therefore, the interdiffusion mechanism at the atomic scale is essential to effectively inhibit excessive interdiffusion and ultimately achieve robust joints. Herein, die-attach samples were prepared by Au substrate with different crystal structures, in which the shear strength reached 43.5 and 34.4 MPa for Sample I and Sample II, respectively. The following crystal structures analysis confirms the sintered Sample I exhibited a higher interface connection rate (ICR) of 47% and lower Ag–Au interdiffusion thickness of $0.2~\mu $ m, both of which benefit the high-quality bonding. Compared to Sample II (~82.3%), the relatively low proportion of high-angle grain boundaries in Sample I (~81%) may inhibit interdiffusion and favor higher shear strength. Finally, molecular dynamics simulations (MDSs) were employed to better understand the performance difference between Sample I and Sample II. The simulation results reveal that the interdiffusion process tends to occur on Au substrates with small grain size, high-angle grain boundaries, high proportion of Au (111) plane, and elevated sintering temperatures. The proposed interdiffusion mechanism facilitates the development of die-attach through sintered Ag paste and Au metallization substrate, enhancing the reliable packaging of WBG devices.
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来源期刊
IEEE Transactions on Components, Packaging and Manufacturing Technology
IEEE Transactions on Components, Packaging and Manufacturing Technology ENGINEERING, MANUFACTURING-ENGINEERING, ELECTRICAL & ELECTRONIC
CiteScore
4.70
自引率
13.60%
发文量
203
审稿时长
3 months
期刊介绍: IEEE Transactions on Components, Packaging, and Manufacturing Technology publishes research and application articles on modeling, design, building blocks, technical infrastructure, and analysis underpinning electronic, photonic and MEMS packaging, in addition to new developments in passive components, electrical contacts and connectors, thermal management, and device reliability; as well as the manufacture of electronics parts and assemblies, with broad coverage of design, factory modeling, assembly methods, quality, product robustness, and design-for-environment.
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