M Ryu, F Könemann, S Kamegaki, C van Nisselroy, K Buddha, E Cagin, J Morikawa
{"title":"利用热扫描探针光刻(t-SPL)系统检测动态温度调制。","authors":"M Ryu, F Könemann, S Kamegaki, C van Nisselroy, K Buddha, E Cagin, J Morikawa","doi":"10.1063/5.0245701","DOIUrl":null,"url":null,"abstract":"<p><p>Nanoscale measurements of thermophysical properties, based on detecting temperature responses to periodic heat stimulation, can be achieved using a localized heating point instead of a localized sensing point. However, the concept of determining localized thermophysical properties via nano-heating as an alternative to nano-sensing has not yet been validated. In this study, we demonstrate the measurement of thermal diffusivity within a nanoscale-confined volume using a thermal scanning probe lithography (t-SPL) system. The sharp tip of the t-SPL probe is employed to locally and periodically heat the sample, which is placed on a pre-fabricated micro-thermocouple. Using the temperature wave analysis method, the thermal diffusivity of the sample is inferred from the frequency-dependent phase shift in the temperature response of a thermocouple. This technique was applied to the microscale structure of a chemically amplified negative-tone photoresist (mr-DWL). We show that confining the heat source to a nanoscale point contact can achieve spatial resolution at the nanoscale (10-100 nm), offering an alternative approach to miniaturizing the detector sensor.</p>","PeriodicalId":21111,"journal":{"name":"Review of Scientific Instruments","volume":"96 4","pages":""},"PeriodicalIF":1.3000,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Detection of dynamic temperature modulation using a thermal scanning probe lithography (t-SPL) system.\",\"authors\":\"M Ryu, F Könemann, S Kamegaki, C van Nisselroy, K Buddha, E Cagin, J Morikawa\",\"doi\":\"10.1063/5.0245701\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Nanoscale measurements of thermophysical properties, based on detecting temperature responses to periodic heat stimulation, can be achieved using a localized heating point instead of a localized sensing point. However, the concept of determining localized thermophysical properties via nano-heating as an alternative to nano-sensing has not yet been validated. In this study, we demonstrate the measurement of thermal diffusivity within a nanoscale-confined volume using a thermal scanning probe lithography (t-SPL) system. The sharp tip of the t-SPL probe is employed to locally and periodically heat the sample, which is placed on a pre-fabricated micro-thermocouple. Using the temperature wave analysis method, the thermal diffusivity of the sample is inferred from the frequency-dependent phase shift in the temperature response of a thermocouple. This technique was applied to the microscale structure of a chemically amplified negative-tone photoresist (mr-DWL). We show that confining the heat source to a nanoscale point contact can achieve spatial resolution at the nanoscale (10-100 nm), offering an alternative approach to miniaturizing the detector sensor.</p>\",\"PeriodicalId\":21111,\"journal\":{\"name\":\"Review of Scientific Instruments\",\"volume\":\"96 4\",\"pages\":\"\"},\"PeriodicalIF\":1.3000,\"publicationDate\":\"2025-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Review of Scientific Instruments\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1063/5.0245701\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Review of Scientific Instruments","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1063/5.0245701","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
Detection of dynamic temperature modulation using a thermal scanning probe lithography (t-SPL) system.
Nanoscale measurements of thermophysical properties, based on detecting temperature responses to periodic heat stimulation, can be achieved using a localized heating point instead of a localized sensing point. However, the concept of determining localized thermophysical properties via nano-heating as an alternative to nano-sensing has not yet been validated. In this study, we demonstrate the measurement of thermal diffusivity within a nanoscale-confined volume using a thermal scanning probe lithography (t-SPL) system. The sharp tip of the t-SPL probe is employed to locally and periodically heat the sample, which is placed on a pre-fabricated micro-thermocouple. Using the temperature wave analysis method, the thermal diffusivity of the sample is inferred from the frequency-dependent phase shift in the temperature response of a thermocouple. This technique was applied to the microscale structure of a chemically amplified negative-tone photoresist (mr-DWL). We show that confining the heat source to a nanoscale point contact can achieve spatial resolution at the nanoscale (10-100 nm), offering an alternative approach to miniaturizing the detector sensor.
期刊介绍:
Review of Scientific Instruments, is committed to the publication of advances in scientific instruments, apparatuses, and techniques. RSI seeks to meet the needs of engineers and scientists in physics, chemistry, and the life sciences.