利用热扫描探针光刻(t-SPL)系统检测动态温度调制。

IF 1.3 4区 工程技术 Q3 INSTRUMENTS & INSTRUMENTATION
M Ryu, F Könemann, S Kamegaki, C van Nisselroy, K Buddha, E Cagin, J Morikawa
{"title":"利用热扫描探针光刻(t-SPL)系统检测动态温度调制。","authors":"M Ryu, F Könemann, S Kamegaki, C van Nisselroy, K Buddha, E Cagin, J Morikawa","doi":"10.1063/5.0245701","DOIUrl":null,"url":null,"abstract":"<p><p>Nanoscale measurements of thermophysical properties, based on detecting temperature responses to periodic heat stimulation, can be achieved using a localized heating point instead of a localized sensing point. However, the concept of determining localized thermophysical properties via nano-heating as an alternative to nano-sensing has not yet been validated. In this study, we demonstrate the measurement of thermal diffusivity within a nanoscale-confined volume using a thermal scanning probe lithography (t-SPL) system. The sharp tip of the t-SPL probe is employed to locally and periodically heat the sample, which is placed on a pre-fabricated micro-thermocouple. Using the temperature wave analysis method, the thermal diffusivity of the sample is inferred from the frequency-dependent phase shift in the temperature response of a thermocouple. This technique was applied to the microscale structure of a chemically amplified negative-tone photoresist (mr-DWL). We show that confining the heat source to a nanoscale point contact can achieve spatial resolution at the nanoscale (10-100 nm), offering an alternative approach to miniaturizing the detector sensor.</p>","PeriodicalId":21111,"journal":{"name":"Review of Scientific Instruments","volume":"96 4","pages":""},"PeriodicalIF":1.3000,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Detection of dynamic temperature modulation using a thermal scanning probe lithography (t-SPL) system.\",\"authors\":\"M Ryu, F Könemann, S Kamegaki, C van Nisselroy, K Buddha, E Cagin, J Morikawa\",\"doi\":\"10.1063/5.0245701\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Nanoscale measurements of thermophysical properties, based on detecting temperature responses to periodic heat stimulation, can be achieved using a localized heating point instead of a localized sensing point. However, the concept of determining localized thermophysical properties via nano-heating as an alternative to nano-sensing has not yet been validated. In this study, we demonstrate the measurement of thermal diffusivity within a nanoscale-confined volume using a thermal scanning probe lithography (t-SPL) system. The sharp tip of the t-SPL probe is employed to locally and periodically heat the sample, which is placed on a pre-fabricated micro-thermocouple. Using the temperature wave analysis method, the thermal diffusivity of the sample is inferred from the frequency-dependent phase shift in the temperature response of a thermocouple. This technique was applied to the microscale structure of a chemically amplified negative-tone photoresist (mr-DWL). We show that confining the heat source to a nanoscale point contact can achieve spatial resolution at the nanoscale (10-100 nm), offering an alternative approach to miniaturizing the detector sensor.</p>\",\"PeriodicalId\":21111,\"journal\":{\"name\":\"Review of Scientific Instruments\",\"volume\":\"96 4\",\"pages\":\"\"},\"PeriodicalIF\":1.3000,\"publicationDate\":\"2025-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Review of Scientific Instruments\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1063/5.0245701\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Review of Scientific Instruments","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1063/5.0245701","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0

摘要

基于周期性热刺激的温度响应检测的热物理性质的纳米尺度测量可以使用局部发热点而不是局部感测点来实现。然而,通过纳米加热作为纳米传感的替代方法来确定局部热物理性质的概念尚未得到验证。在这项研究中,我们展示了使用热扫描探针光刻(t-SPL)系统测量纳米级受限体积内的热扩散率。t-SPL探针的尖端被用来局部和周期性地加热样品,样品被放置在预制的微热电偶上。利用温度波分析方法,从热电偶温度响应的频率相关相移推断样品的热扩散系数。将该技术应用于化学放大负色调光刻胶(mr-DWL)的微尺度结构。我们表明,将热源限制在纳米尺度的点接触上可以实现纳米尺度(10-100 nm)的空间分辨率,为探测器传感器小型化提供了另一种方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Detection of dynamic temperature modulation using a thermal scanning probe lithography (t-SPL) system.

Nanoscale measurements of thermophysical properties, based on detecting temperature responses to periodic heat stimulation, can be achieved using a localized heating point instead of a localized sensing point. However, the concept of determining localized thermophysical properties via nano-heating as an alternative to nano-sensing has not yet been validated. In this study, we demonstrate the measurement of thermal diffusivity within a nanoscale-confined volume using a thermal scanning probe lithography (t-SPL) system. The sharp tip of the t-SPL probe is employed to locally and periodically heat the sample, which is placed on a pre-fabricated micro-thermocouple. Using the temperature wave analysis method, the thermal diffusivity of the sample is inferred from the frequency-dependent phase shift in the temperature response of a thermocouple. This technique was applied to the microscale structure of a chemically amplified negative-tone photoresist (mr-DWL). We show that confining the heat source to a nanoscale point contact can achieve spatial resolution at the nanoscale (10-100 nm), offering an alternative approach to miniaturizing the detector sensor.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Review of Scientific Instruments
Review of Scientific Instruments 工程技术-物理:应用
CiteScore
3.00
自引率
12.50%
发文量
758
审稿时长
2.6 months
期刊介绍: Review of Scientific Instruments, is committed to the publication of advances in scientific instruments, apparatuses, and techniques. RSI seeks to meet the needs of engineers and scientists in physics, chemistry, and the life sciences.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信