由环元原子组成的极端紫外超构透镜

IF 3.1 3区物理与天体物理 Q2 Engineering

Optik Pub Date : 2025-02-15 DOI:10.1016/j.ijleo.2025.172258

D. Zárate-Villegas, Ivan Moreno

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引用次数: 0

摘要

由于光学材料的强吸收，设计波长低于121纳米的透镜具有挑战性。本文介绍了一种能有效聚焦极紫外（EUV）辐射的环形二氧化硅纳米元超构透镜。每个环都有一个空气或真空核心（n=1），周围是折射率为n<；1的二氧化硅，为EUV操作优化。时域有限差分（FDTD）仿真结果表明，该激光器的相位覆盖率为1.85 π，具有高的EUV传输速率和83.6%的光效率。这些结果代表了现有的EUV超透镜的重大进步，并强调了这种设计在紧凑和高效的EUV光学系统中的潜力。

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Extreme UV metalens consisting of ring meta-atoms

Designing lenses for wavelengths below 121 nm is challenging due to the strong absorption of optical materials. This study introduces a metalens composed of ring-shaped silica nano-elements that efficiently focus extreme ultraviolet (EUV) radiation. Each ring features an air or vacuum core (

n = 1

) surrounded by silica with a refractive index

n < 1

, optimized for EUV operation. Finite-difference time-domain (FDTD) simulations demonstrate a phase coverage of 1.85

π

, high EUV transmission, and an optical efficiency of 83.6%. These results represent a significant advancement over existing EUV metalenses, and underscore the potential of this design for compact and efficient EUV optical systems.

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来源期刊

Optik 物理-光学

CiteScore

6.90

自引率

12.90%

发文量

1471

审稿时长

46 days

期刊介绍： Optik publishes articles on all subjects related to light and electron optics and offers a survey on the state of research and technical development within the following fields: Optics: -Optics design, geometrical and beam optics, wave optics- Optical and micro-optical components, diffractive optics, devices and systems- Photoelectric and optoelectronic devices- Optical properties of materials, nonlinear optics, wave propagation and transmission in homogeneous and inhomogeneous materials- Information optics, image formation and processing, holographic techniques, microscopes and spectrometer techniques, and image analysis- Optical testing and measuring techniques- Optical communication and computing- Physiological optics- As well as other related topics.