Numerical Study on Kr/Cl2 DBD Excilamp with Forward Reactions of Higher Excited KrCl

We establish an excilamp model of the Kr/Cl₂ Dielectric Barrier Discharge (DBD) and prove the rationality of the model by the experiment. It includes forward reactions of higher excited KrCl, such as the harpooning reaction, quenching reaction, and discharge radiation. Based on the forward reaction system, we present an energy level diagram of the reaction path, which serves as a foundation for deeper comprehension of the impact of the activated KrCl and Kr₂Cl chemical processes on the production and intensification of radiation at 222 nm. The microdischarge amplitude appears to be reduced due to the quenching equilibrium effect which is enhanced when the KrCl excited state converts to Kr₂Cl and the discharge current appears to lag due to the figinternal field resistance. The density of excited KrCl particles decreases by 7.6% and power efficiency rises by 1.7% lift with every 20 mbar increment for a higher probability of inelastic collision. A greater proportion of chlorine increases the probability of a reaction with chlorine, inhibiting the creation of radiation particles and enhancing the quenching of radiation reactions. The action balances the numerical concentrations of Kr and Cl and strongly suppresses the excited Kr₂Cl particles. The simulation demonstrates that there are negligible disturbance on power supply efficiency as the proportion of 325 nm radiation in the spectrum decreases from 6 to 1%. The change of discharge gap will cause the change of discharge mode, and higher discharge gap will cause more intense glow discharge.