用实验室设备研究薄膜波导的掠射x射线荧光特性

IF 2 4区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS

Thin Solid Films Pub Date : 2025-01-01 DOI:10.1016/j.tsf.2024.140588

T.N. Terentev , M. Gateshki , A. Tiwari , R. de Vries , V. Jovanovic , M.D. Ackermann , I.A. Makhotkin

{"title":"用实验室设备研究薄膜波导的掠射x射线荧光特性","authors":"T.N. Terentev , M. Gateshki , A. Tiwari , R. de Vries , V. Jovanovic , M.D. Ackermann , I.A. Makhotkin","doi":"10.1016/j.tsf.2024.140588","DOIUrl":null,"url":null,"abstract":"<div><div>Grazing emission X-ray fluorescence (GEXRF) is a unique technique with <span><math><mrow><mi>μ</mi><mi>m</mi></mrow></math></span> spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"809 ","pages":"Article 140588"},"PeriodicalIF":2.0000,"publicationDate":"2025-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment\",\"authors\":\"T.N. Terentev , M. Gateshki , A. Tiwari , R. de Vries , V. Jovanovic , M.D. Ackermann , I.A. Makhotkin\",\"doi\":\"10.1016/j.tsf.2024.140588\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Grazing emission X-ray fluorescence (GEXRF) is a unique technique with <span><math><mrow><mi>μ</mi><mi>m</mi></mrow></math></span> spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.</div></div>\",\"PeriodicalId\":23182,\"journal\":{\"name\":\"Thin Solid Films\",\"volume\":\"809 \",\"pages\":\"Article 140588\"},\"PeriodicalIF\":2.0000,\"publicationDate\":\"2025-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Thin Solid Films\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0040609024003894\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, COATINGS & FILMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Solid Films","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0040609024003894","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}

引用次数: 0

摘要

掠射x射线荧光（geexrf）是一种具有μm空间分辨率的独特技术，可以在nm深度分辨率下进行元素表征。x射线设备的发展不足使实验室环境中的常规geexrf测量复杂化。我们提出了结合x射线反射率和geexrf测量的可能性，使用线性探测器和传统的铜阳极x射线管，使用自由形式方法重建x射线波导的深度和元素剖面。利用已建立的x射线反射率和掠入射联合XRF实验对重建的深度剖面进行了验证。

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Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment

Grazing emission X-ray fluorescence (GEXRF) is a unique technique with

μ m

spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.

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来源期刊

Thin Solid Films 工程技术-材料科学：膜

CiteScore

4.00

自引率

4.80%

发文量

381

审稿时长

7.5 months

期刊介绍： Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.