{"title":"单壁碳纳米管掺杂对溶液法制备氧化铟薄膜晶体管的影响","authors":"Han-Lin Zhao;Sung-Jin Kim","doi":"10.1109/TED.2024.3499941","DOIUrl":null,"url":null,"abstract":"The p-type conductivity often observed in single-wall carbon nanotube (SW-CNT) thin-film transistors (TFTs) is usually attributed to the doping effect of oxygen adsorption when SW-CNT are exposed to air caused by differences in the figure of merit, which results in asymmetric electron and hole injection. We performed comparative tests by doping SW-CNTs into the Indium oxide (In2O3/SW-CNT) channel layer, fabricated semiconductor devices, and investigated the device performance and film properties. It was determined that both In2O3 and In2O3/SW-CNT devices exhibit n-type behavior with significant saturation behavior and gate control under positive bias. The In2O3/SW-CNT TFTs have higher saturation mobility (\n<inline-formula> <tex-math>$\\mu _{\\text {sat}}$ </tex-math></inline-formula>\n) and on/off current ratio (\n<inline-formula> <tex-math>${I}_{\\text {ON}}/{I}_{\\text {OFF}}$ </tex-math></inline-formula>\n). In particular, the \n<inline-formula> <tex-math>$\\mu _{\\text {sat}}$ </tex-math></inline-formula>\n is increased by ~3 times, and the \n<inline-formula> <tex-math>${I}_{\\text {ON}}/{I}_{\\text {OFF}}$ </tex-math></inline-formula>\n is increased to \n<inline-formula> <tex-math>$\\sim 10^{{6}}$ </tex-math></inline-formula>\n. Also, under negative bias stress (NBS), it exhibits better stability and signal inversion capability by resistive loading of the inverter. These results indicate that solution-prepared In2O3/SW-CNT TFTs can be used in low-cost, low-temperature, high-performance electronic devices.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":"72 1","pages":"271-276"},"PeriodicalIF":2.9000,"publicationDate":"2024-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of Single-Wall Carbon Nanotube Doping on Solution-Processed Indium Oxide Thin-Film Transistors\",\"authors\":\"Han-Lin Zhao;Sung-Jin Kim\",\"doi\":\"10.1109/TED.2024.3499941\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The p-type conductivity often observed in single-wall carbon nanotube (SW-CNT) thin-film transistors (TFTs) is usually attributed to the doping effect of oxygen adsorption when SW-CNT are exposed to air caused by differences in the figure of merit, which results in asymmetric electron and hole injection. We performed comparative tests by doping SW-CNTs into the Indium oxide (In2O3/SW-CNT) channel layer, fabricated semiconductor devices, and investigated the device performance and film properties. It was determined that both In2O3 and In2O3/SW-CNT devices exhibit n-type behavior with significant saturation behavior and gate control under positive bias. The In2O3/SW-CNT TFTs have higher saturation mobility (\\n<inline-formula> <tex-math>$\\\\mu _{\\\\text {sat}}$ </tex-math></inline-formula>\\n) and on/off current ratio (\\n<inline-formula> <tex-math>${I}_{\\\\text {ON}}/{I}_{\\\\text {OFF}}$ </tex-math></inline-formula>\\n). In particular, the \\n<inline-formula> <tex-math>$\\\\mu _{\\\\text {sat}}$ </tex-math></inline-formula>\\n is increased by ~3 times, and the \\n<inline-formula> <tex-math>${I}_{\\\\text {ON}}/{I}_{\\\\text {OFF}}$ </tex-math></inline-formula>\\n is increased to \\n<inline-formula> <tex-math>$\\\\sim 10^{{6}}$ </tex-math></inline-formula>\\n. Also, under negative bias stress (NBS), it exhibits better stability and signal inversion capability by resistive loading of the inverter. These results indicate that solution-prepared In2O3/SW-CNT TFTs can be used in low-cost, low-temperature, high-performance electronic devices.\",\"PeriodicalId\":13092,\"journal\":{\"name\":\"IEEE Transactions on Electron Devices\",\"volume\":\"72 1\",\"pages\":\"271-276\"},\"PeriodicalIF\":2.9000,\"publicationDate\":\"2024-11-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Electron Devices\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10769010/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Electron Devices","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10769010/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Effect of Single-Wall Carbon Nanotube Doping on Solution-Processed Indium Oxide Thin-Film Transistors
The p-type conductivity often observed in single-wall carbon nanotube (SW-CNT) thin-film transistors (TFTs) is usually attributed to the doping effect of oxygen adsorption when SW-CNT are exposed to air caused by differences in the figure of merit, which results in asymmetric electron and hole injection. We performed comparative tests by doping SW-CNTs into the Indium oxide (In2O3/SW-CNT) channel layer, fabricated semiconductor devices, and investigated the device performance and film properties. It was determined that both In2O3 and In2O3/SW-CNT devices exhibit n-type behavior with significant saturation behavior and gate control under positive bias. The In2O3/SW-CNT TFTs have higher saturation mobility (
$\mu _{\text {sat}}$
) and on/off current ratio (
${I}_{\text {ON}}/{I}_{\text {OFF}}$
). In particular, the
$\mu _{\text {sat}}$
is increased by ~3 times, and the
${I}_{\text {ON}}/{I}_{\text {OFF}}$
is increased to
$\sim 10^{{6}}$
. Also, under negative bias stress (NBS), it exhibits better stability and signal inversion capability by resistive loading of the inverter. These results indicate that solution-prepared In2O3/SW-CNT TFTs can be used in low-cost, low-temperature, high-performance electronic devices.
期刊介绍:
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.