总电离剂量对新兴垂直背栅CMOS平台DC/RF性能的影响

IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Yue Ma;Jinshun Bi;Biyao Zhao;Linjie Fan;Jianjian Wang;Gangping Yan;Ziming Xu;Baihong Chen;Hanying Deng;Zhiqiang Li;Viktor Stempitsky
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引用次数: 0

摘要

随着硅基晶体管的缩小达到其物理极限,垂直结构互补金属氧化物半导体(VCMOS)工艺由于其相对优势,在积极的可扩展性方面已经成为一种有前途的技术。沿着这些思路,在本工作中,提出了一种新兴的纳米级垂直背栅(VBG) CMOS平台,其栅极长度取决于沉积工艺而不是光刻工艺的精度。此外,通过计算机辅助设计(TCAD)仿真研究了总电离剂量(TID)对所提出的VBG mosfet直流和射频特性的影响。此外,利用VBG CMOS平台实现了高集成度的逆变器。本文还对该逆变器在TID效应下的直流和暂态性能进行了表征。仿真结果表明,尽管VBG CMOS平台具有应用于数字集成电路和射频集成电路的潜力,但对TID的灵敏度仍然是一个需要缓解的问题。这项工作为VBG mosfet和电路的抗tid设计提供了有价值的指导。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Total Ionizing Dose Effects on DC/RF Performances of Emerging Vertical Back-Gate CMOS Platform
As the scaling down of the silicon (Si)-based transistors is reaching its physical limits, the vertical-structure complementary metal-oxide-semiconductor (VCMOS) process has emerged as a promising technology due its comparative advantages, in terms of aggressive scalability. Along these lines, in this work, an emerging nano-scale vertical back-gate (VBG) CMOS platform with gate length depending on the deposition process instead of the accuracy of the lithography process was proposed. In addition, the total ionizing dose (TID) effects on both the direct current and radio frequency characteristics of the proposed VBG MOSFETs were investigated by performing technology computer aided design (TCAD) simulations. Besides, a high integration-density inverter was implemented by the VBG CMOS platform as well. Both the DC and transient performances of the proposed inverter under TID effects were also characterized. From the simulated results it was demonstrated that although the VBG CMOS platform has the potential to be applied in digital integrated circuits (ICs) and RF ICs, the sensitivity to TID is still a problem to be mitigated. This work provides valuable guidelines for the TID-hardened design of VBG MOSFETs and circuits.
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来源期刊
IEEE Transactions on Device and Materials Reliability
IEEE Transactions on Device and Materials Reliability 工程技术-工程:电子与电气
CiteScore
4.80
自引率
5.00%
发文量
71
审稿时长
6-12 weeks
期刊介绍: The scope of the publication includes, but is not limited to Reliability of: Devices, Materials, Processes, Interfaces, Integrated Microsystems (including MEMS & Sensors), Transistors, Technology (CMOS, BiCMOS, etc.), Integrated Circuits (IC, SSI, MSI, LSI, ULSI, ELSI, etc.), Thin Film Transistor Applications. The measurement and understanding of the reliability of such entities at each phase, from the concept stage through research and development and into manufacturing scale-up, provides the overall database on the reliability of the devices, materials, processes, package and other necessities for the successful introduction of a product to market. This reliability database is the foundation for a quality product, which meets customer expectation. A product so developed has high reliability. High quality will be achieved because product weaknesses will have been found (root cause analysis) and designed out of the final product. This process of ever increasing reliability and quality will result in a superior product. In the end, reliability and quality are not one thing; but in a sense everything, which can be or has to be done to guarantee that the product successfully performs in the field under customer conditions. Our goal is to capture these advances. An additional objective is to focus cross fertilized communication in the state of the art of reliability of electronic materials and devices and provide fundamental understanding of basic phenomena that affect reliability. In addition, the publication is a forum for interdisciplinary studies on reliability. An overall goal is to provide leading edge/state of the art information, which is critically relevant to the creation of reliable products.
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