不同几何形状的垂直排列碳纳米管阴极的场发射特性

IF 1.3 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS
Connor Gunter;Scott D. Kovaleski;Junyoung Shin;Elizabeth Bellott;Matthew Maschmann;Brandon Weatherford
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引用次数: 0

摘要

本文研究了不同几何形状的碳纳米管(CNT)森林阴极的体发射特性。探索的几何结构包括生长在$5 × 5$ mm硅(Si)衬底上的不同高度的密集纳米管森林,以及使用UV光刻技术制造的离散的图案碳纳米管柱。密林高度范围为$526~\mu \text {m}$ ~ 1.41 mm,以固定生长密林的平均纳米管间距为100 nm计算密林的堆积分数为4e10纳米管/cm2。图案化样品的微柱高度范围为47 ~ 393~\mu \text {m}$,测试样品的柱宽度范围为250 ~ 270~\mu \text {m}$。研究的特性包括发射电流、导通场和随时间的发射电流性能。开发了具有100- $\mu \text {m}$ A- k间隙的平行板电子束二极管和自动测试装置,以提供可配置的实验,为直流,直流扫描和定时性能测试提供准确和可重复的测量。电压扫描的工作电压范围从0到−350v。测试表明,在整个测试期间,与应用场史相关的发射电流存在滞后效应,并且导通场强也会发生变化,这表明在使用过程中存在调节效应。在扫描试验中,在I-V曲线上也观察到三个独立的发射区。在几何研究中,密集的森林和有图案的样品被扫描到−250 V的峰值施加电压,高的样品通常表现更好。在几何研究中,浓密森林排放物产生的电流范围为36.8 ~ 572.34~\mu \text {A}$,电流密度范围为15 ~ 2.29 mA/cm2。由图案微柱发射器产生的电流范围为39.4 ~ 317.51~\mu \text {A}$,电流密度范围为67 ~ 3 mA/cm2。直流时间测试显示,在4.5 h的测试周期内,输出电流相对稳定。这项工作的发现旨在探索碳纳米管发射器作为大型射频系统中使用的热离子阴极的可行替代品,并表征碳纳米管发射器几何形状与由此产生的发射性能之间的联系。从这项工作中获得的见解将用于未来排放物的知情设计和优化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Field-Emission Properties of Vertically Aligned Carbon Nanotube Cathodes of Varying Geometries
This work characterizes the bulk emission properties of carbon nanotube (CNT) forest cathodes fabricated with various geometries. Geometries explored include dense nanotube forests of varying height grown on $5\times 5$ mm silicon (Si) substrates and discrete, patterned CNT pillars fabricated using UV photolithography. Dense forests heights ranged from $526~\mu \text { m}$ to 1.41 mm, with packing fraction for dense forest calculated to be 4e10 nanotubes/cm2 based on an average nanotube separation distance of 100 nm for fixed growth dense forests. Patterned sample micro pillar heights ranged from 47 to $393~\mu \text { m}$ with pillar widths on tested samples ranging from 250 to $270~\mu \text { m}$ . Properties explored include emission current, turn-on field, and emission current performance over time. A parallel plate electron beam diode with a 100- $\mu \text { m}$ A-K gap and an automated test apparatus were developed to provide a configurable experiment that provides accurate and repeatable measurements for dc, dc sweep, and timed performance testing. Operating voltages for the voltage sweeps spanned from 0 to −350 V. Testing has shown evidence of a hysteresis effect on the emission current tied to the applied field history as well as shifting of the turn-on field magnitude throughout the testing period, suggesting a conditioning effect during use. Three separate emission regions in the I–V curves during sweep testing have also been observed. In the geometric study, dense forests and patterned samples were sweep tested up to a peak applied voltage of −250 V, with the taller samples generally performing better. Currents produced in the geometric study from the dense forest emitters ranged from 36.8 to $572.34~\mu \text { A}$ , with current densities ranging from 15 to 2.29 mA/cm2. Currents produced from the patterned micropillar emitters ranged from 39.4 to $317.51~\mu \text { A}$ , with current densities ranging from 67 to 3 mA/cm2. DC time testing showed a relatively stable output current over a 4.5-h testing period. The findings of this work aim to explore CNT emitters as a viable alternative to thermionic cathodes used in large RF systems and to characterize connection between CNT emitter geometry and the resulting emission performance. The insights gained from this work will be used for informed design and optimization of future emitters.
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来源期刊
IEEE Transactions on Plasma Science
IEEE Transactions on Plasma Science 物理-物理:流体与等离子体
CiteScore
3.00
自引率
20.00%
发文量
538
审稿时长
3.8 months
期刊介绍: The scope covers all aspects of the theory and application of plasma science. It includes the following areas: magnetohydrodynamics; thermionics and plasma diodes; basic plasma phenomena; gaseous electronics; microwave/plasma interaction; electron, ion, and plasma sources; space plasmas; intense electron and ion beams; laser-plasma interactions; plasma diagnostics; plasma chemistry and processing; solid-state plasmas; plasma heating; plasma for controlled fusion research; high energy density plasmas; industrial/commercial applications of plasma physics; plasma waves and instabilities; and high power microwave and submillimeter wave generation.
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