Giuk Kim;Hyojun Choi;Hongrae Cho;Sangho Lee;Hunbeom Shin;Hyunjun Kang;Hoon Kim;Seokjoong Shin;Seonjae Park;Sunseong Kwon;Youngjin Lim;Kang Kim;Jong Min Chung;Il-Kwon Oh;Sang-Hee Ko Park;Jinho Ahn;Sanghun Jeon
{"title":"优化栅极注入式铁电 NAND 单元中的去俘获脉冲,最大限度地减少写入后读取延迟问题","authors":"Giuk Kim;Hyojun Choi;Hongrae Cho;Sangho Lee;Hunbeom Shin;Hyunjun Kang;Hoon Kim;Seokjoong Shin;Seonjae Park;Sunseong Kwon;Youngjin Lim;Kang Kim;Jong Min Chung;Il-Kwon Oh;Sang-Hee Ko Park;Jinho Ahn;Sanghun Jeon","doi":"10.1109/LED.2024.3482099","DOIUrl":null,"url":null,"abstract":"The ferroelectric (FE) NAND flash, featuring metal-interlayer-FE-interlayer-silicon (MIFIS) gate stacks, leverages both charge trapping and polarization (P) switching to achieve a broad memory window (MW) and low operation voltage. These remarkable advancements establish it as a viable contender for future NAND flash technologies. However, the read-after-write-delay (RAWD) problem during program/erase (PGM/ERS), caused by channel-injected interface trapped charges (\n<inline-formula> <tex-math>${Q}_{\\text {it}}$ </tex-math></inline-formula>\n) between the FE layer and the channel interlayer (Ch.IL), leading to short-term Vth variations, remains unexplored in MIFIS FE-NAND cells. This letter presents the first analysis of RAWD in FE-NAND cells, including the experimental optimization of a de-trap pulse that effectively eliminates \n<inline-formula> <tex-math>${Q}_{\\text {it}}$ </tex-math></inline-formula>\n whereas preserving both gate-injected interface trapped charges (\n<inline-formula> <tex-math>${Q}_{\\text {it}}$ </tex-math></inline-formula>\n’) and P. Consequently, the FE-NAND cell exhibits a narrow MW of 3.45 V at a delay time (\n<inline-formula> <tex-math>${t}_{\\text {Delay}}\\text {)}$ </tex-math></inline-formula>\n of \n<inline-formula> <tex-math>$1~\\mu $ </tex-math></inline-formula>\ns between PGM/ERS and read operations, expending to 7.40 V at a tDelay of 1 s. This variation is attributed to the generation of \n<inline-formula> <tex-math>${Q}_{\\text {it}}$ </tex-math></inline-formula>\n and the subsequent de-trap process, affecting channel conductivity. To thoroughly address the RAWD, various pulse widths and amplitudes are experimentally explored immediately post-PGM/ERS to optimize the de-trap pulse for selective \n<inline-formula> <tex-math>${Q}_{\\text {it}}$ </tex-math></inline-formula>\n removal. Upon applying the optimized de-trap pulse, the stable wide MW (7.40 V) is consistently maintained regardless of \n<inline-formula> <tex-math>${t}_{\\text {Delay}}$ </tex-math></inline-formula>\n. This work is meaningful as it brings attention to previously unexplored issues in next-generation ferroelectric (FE) NAND cells and suggests practical operational solutions.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 12","pages":"2359-2362"},"PeriodicalIF":4.1000,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optimizing De-Trap Pulses in Gate-Injection Type Ferroelectric NAND Cells to Minimize Read After Write Delay Issue\",\"authors\":\"Giuk Kim;Hyojun Choi;Hongrae Cho;Sangho Lee;Hunbeom Shin;Hyunjun Kang;Hoon Kim;Seokjoong Shin;Seonjae Park;Sunseong Kwon;Youngjin Lim;Kang Kim;Jong Min Chung;Il-Kwon Oh;Sang-Hee Ko Park;Jinho Ahn;Sanghun Jeon\",\"doi\":\"10.1109/LED.2024.3482099\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The ferroelectric (FE) NAND flash, featuring metal-interlayer-FE-interlayer-silicon (MIFIS) gate stacks, leverages both charge trapping and polarization (P) switching to achieve a broad memory window (MW) and low operation voltage. These remarkable advancements establish it as a viable contender for future NAND flash technologies. However, the read-after-write-delay (RAWD) problem during program/erase (PGM/ERS), caused by channel-injected interface trapped charges (\\n<inline-formula> <tex-math>${Q}_{\\\\text {it}}$ </tex-math></inline-formula>\\n) between the FE layer and the channel interlayer (Ch.IL), leading to short-term Vth variations, remains unexplored in MIFIS FE-NAND cells. This letter presents the first analysis of RAWD in FE-NAND cells, including the experimental optimization of a de-trap pulse that effectively eliminates \\n<inline-formula> <tex-math>${Q}_{\\\\text {it}}$ </tex-math></inline-formula>\\n whereas preserving both gate-injected interface trapped charges (\\n<inline-formula> <tex-math>${Q}_{\\\\text {it}}$ </tex-math></inline-formula>\\n’) and P. Consequently, the FE-NAND cell exhibits a narrow MW of 3.45 V at a delay time (\\n<inline-formula> <tex-math>${t}_{\\\\text {Delay}}\\\\text {)}$ </tex-math></inline-formula>\\n of \\n<inline-formula> <tex-math>$1~\\\\mu $ </tex-math></inline-formula>\\ns between PGM/ERS and read operations, expending to 7.40 V at a tDelay of 1 s. This variation is attributed to the generation of \\n<inline-formula> <tex-math>${Q}_{\\\\text {it}}$ </tex-math></inline-formula>\\n and the subsequent de-trap process, affecting channel conductivity. To thoroughly address the RAWD, various pulse widths and amplitudes are experimentally explored immediately post-PGM/ERS to optimize the de-trap pulse for selective \\n<inline-formula> <tex-math>${Q}_{\\\\text {it}}$ </tex-math></inline-formula>\\n removal. Upon applying the optimized de-trap pulse, the stable wide MW (7.40 V) is consistently maintained regardless of \\n<inline-formula> <tex-math>${t}_{\\\\text {Delay}}$ </tex-math></inline-formula>\\n. This work is meaningful as it brings attention to previously unexplored issues in next-generation ferroelectric (FE) NAND cells and suggests practical operational solutions.\",\"PeriodicalId\":13198,\"journal\":{\"name\":\"IEEE Electron Device Letters\",\"volume\":\"45 12\",\"pages\":\"2359-2362\"},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2024-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Electron Device Letters\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10739400/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Electron Device Letters","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10739400/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Optimizing De-Trap Pulses in Gate-Injection Type Ferroelectric NAND Cells to Minimize Read After Write Delay Issue
The ferroelectric (FE) NAND flash, featuring metal-interlayer-FE-interlayer-silicon (MIFIS) gate stacks, leverages both charge trapping and polarization (P) switching to achieve a broad memory window (MW) and low operation voltage. These remarkable advancements establish it as a viable contender for future NAND flash technologies. However, the read-after-write-delay (RAWD) problem during program/erase (PGM/ERS), caused by channel-injected interface trapped charges (
${Q}_{\text {it}}$
) between the FE layer and the channel interlayer (Ch.IL), leading to short-term Vth variations, remains unexplored in MIFIS FE-NAND cells. This letter presents the first analysis of RAWD in FE-NAND cells, including the experimental optimization of a de-trap pulse that effectively eliminates
${Q}_{\text {it}}$
whereas preserving both gate-injected interface trapped charges (
${Q}_{\text {it}}$
’) and P. Consequently, the FE-NAND cell exhibits a narrow MW of 3.45 V at a delay time (
${t}_{\text {Delay}}\text {)}$
of
$1~\mu $
s between PGM/ERS and read operations, expending to 7.40 V at a tDelay of 1 s. This variation is attributed to the generation of
${Q}_{\text {it}}$
and the subsequent de-trap process, affecting channel conductivity. To thoroughly address the RAWD, various pulse widths and amplitudes are experimentally explored immediately post-PGM/ERS to optimize the de-trap pulse for selective
${Q}_{\text {it}}$
removal. Upon applying the optimized de-trap pulse, the stable wide MW (7.40 V) is consistently maintained regardless of
${t}_{\text {Delay}}$
. This work is meaningful as it brings attention to previously unexplored issues in next-generation ferroelectric (FE) NAND cells and suggests practical operational solutions.
期刊介绍:
IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.