Yuanxin Tan , Haotian Lv , Zengrun Wen , Guanhuai Cheng , Zongcheng Mou , Huaiyi Luo , Yingying Ren , Yang Song , Jian Xu , Ya Cheng , Yangjian Cai
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引用次数: 0
摘要
为了在硅玻璃中获得具有对称圆形截面的低损耗、深度不敏感的二维波导阵列,我们采用狭缝整形技术,用低 NA 水浸物镜(10×,0.3NA)制作波导。我们系统地研究了狭缝宽度、脉冲能量、写入速度、扫描次数、处理深度和球差对制造分辨率的影响。我们将这项技术应用于在硅玻璃基底上写入低损耗(0.34 dB/cm)单模波导、一维(1 × 5)和二维(5 × 5)波导阵列。这项技术将用于纠缠量子光子集成电路和拓扑光子学。
Slit shaping technique for femtosecond laser direct write fabrication of two-dimensional symmetric waveguide arrays in silica glass
To obtain low loss, depth-insensitive, 2D waveguide arrays with symmetric circular cross sections in silica glass, we applied slit shaping technique to fabricate waveguides with a low NA water immersion objective lens (10×, 0.3NA). We systematically investigate the influences of slit width, pulse energy, writing speed, the number of scans, processing depth, and spherical aberration on the fabrication resolution. We have applied this technique to write low loss (0.34 dB/cm) single-mode waveguides, 1D (1 × 5) and 2D (5 × 5) waveguide arrays in silica glass substrates. This technique will be useful for entangled quantum photonic integrated circuits and topological photonics.
期刊介绍:
Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication.
The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas:
•development in all types of lasers
•developments in optoelectronic devices and photonics
•developments in new photonics and optical concepts
•developments in conventional optics, optical instruments and components
•techniques of optical metrology, including interferometry and optical fibre sensors
•LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow
•applications of lasers to materials processing, optical NDT display (including holography) and optical communication
•research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume)
•developments in optical computing and optical information processing
•developments in new optical materials
•developments in new optical characterization methods and techniques
•developments in quantum optics
•developments in light assisted micro and nanofabrication methods and techniques
•developments in nanophotonics and biophotonics
•developments in imaging processing and systems