Zhao Hong;Chew Ze Yong;Kosasih Lucky;Goh Jun Rong;Wang Joheng
{"title":"提高半导体制造厂能效的数据驱动方法","authors":"Zhao Hong;Chew Ze Yong;Kosasih Lucky;Goh Jun Rong;Wang Joheng","doi":"10.1109/TSM.2024.3483781","DOIUrl":null,"url":null,"abstract":"The semiconductor industry faces increasing pressure to improve energy efficiency while maintaining competitiveness and sustainability. Apart from more conventional energy efficiency measures look at equipment modernization and process and design optimization, this paper explores the potential of data-driven approaches to address these challenges and optimize energy consumption across both the facility and manufacturing space of a semiconductor manufacture plant. By harnessing advanced analytics, machine learning algorithms, and IoT technologies, semiconductor manufacturers can gain real-time insights into energy usage patterns, and identify areas of opportunities that leads to the implementation of targeted interventions to optimize performance. The paper first looks into the challenges and measures of enabling and enhancing data visibility which is the foundation of the data-driven approach, then it examines case studies, best practices and various systematic approaches, demonstrating the transformative impact of data-driven energy efficiency measures which leads to operational efficiency, cost reduction, and environmental sustainability. Ultimately, this paper aims to provide a fresh angle into the energy efficiency study for peers in semiconductor industries to leverage in their journey towards a more sustainable and energy efficient future.","PeriodicalId":451,"journal":{"name":"IEEE Transactions on Semiconductor Manufacturing","volume":"37 4","pages":"475-480"},"PeriodicalIF":2.3000,"publicationDate":"2024-11-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10742890","citationCount":"0","resultStr":"{\"title\":\"A Data-Driven Approach for Improving Energy Efficiency in a Semiconductor Manufacturing Plant\",\"authors\":\"Zhao Hong;Chew Ze Yong;Kosasih Lucky;Goh Jun Rong;Wang Joheng\",\"doi\":\"10.1109/TSM.2024.3483781\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The semiconductor industry faces increasing pressure to improve energy efficiency while maintaining competitiveness and sustainability. Apart from more conventional energy efficiency measures look at equipment modernization and process and design optimization, this paper explores the potential of data-driven approaches to address these challenges and optimize energy consumption across both the facility and manufacturing space of a semiconductor manufacture plant. By harnessing advanced analytics, machine learning algorithms, and IoT technologies, semiconductor manufacturers can gain real-time insights into energy usage patterns, and identify areas of opportunities that leads to the implementation of targeted interventions to optimize performance. The paper first looks into the challenges and measures of enabling and enhancing data visibility which is the foundation of the data-driven approach, then it examines case studies, best practices and various systematic approaches, demonstrating the transformative impact of data-driven energy efficiency measures which leads to operational efficiency, cost reduction, and environmental sustainability. Ultimately, this paper aims to provide a fresh angle into the energy efficiency study for peers in semiconductor industries to leverage in their journey towards a more sustainable and energy efficient future.\",\"PeriodicalId\":451,\"journal\":{\"name\":\"IEEE Transactions on Semiconductor Manufacturing\",\"volume\":\"37 4\",\"pages\":\"475-480\"},\"PeriodicalIF\":2.3000,\"publicationDate\":\"2024-11-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10742890\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Semiconductor Manufacturing\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10742890/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Semiconductor Manufacturing","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10742890/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
A Data-Driven Approach for Improving Energy Efficiency in a Semiconductor Manufacturing Plant
The semiconductor industry faces increasing pressure to improve energy efficiency while maintaining competitiveness and sustainability. Apart from more conventional energy efficiency measures look at equipment modernization and process and design optimization, this paper explores the potential of data-driven approaches to address these challenges and optimize energy consumption across both the facility and manufacturing space of a semiconductor manufacture plant. By harnessing advanced analytics, machine learning algorithms, and IoT technologies, semiconductor manufacturers can gain real-time insights into energy usage patterns, and identify areas of opportunities that leads to the implementation of targeted interventions to optimize performance. The paper first looks into the challenges and measures of enabling and enhancing data visibility which is the foundation of the data-driven approach, then it examines case studies, best practices and various systematic approaches, demonstrating the transformative impact of data-driven energy efficiency measures which leads to operational efficiency, cost reduction, and environmental sustainability. Ultimately, this paper aims to provide a fresh angle into the energy efficiency study for peers in semiconductor industries to leverage in their journey towards a more sustainable and energy efficient future.
期刊介绍:
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.