Chao Sun , Chunmin Cheng , Zhaofu Zhang , Gai Wu , Hutao Shi , Zhenyang Lei , Lijie Li , Kang Liang , Wei Shen , Sheng Liu
{"title":"氮化硼通孔的信号完整性和传热性能","authors":"Chao Sun , Chunmin Cheng , Zhaofu Zhang , Gai Wu , Hutao Shi , Zhenyang Lei , Lijie Li , Kang Liang , Wei Shen , Sheng Liu","doi":"10.1016/j.microrel.2024.115531","DOIUrl":null,"url":null,"abstract":"<div><div>Silicon interposer is widely used in 2.5D integrated packages due to its good dielectric properties and mature process. However, silicon interposer is not suitable for high-power devices and radio frequency devices, suffering from poor signal integrity and low thermal conduction efficiency. In this work, c-BN is used as an interposer to provide a solution for electrical signal interference and thermal aggregation in the devices. In addition, PTFE, glass and h-BN, w-BN have also been studied for comparison. The finite element simulation results show that the return loss of the TBV (c) is 3.3 dB lower than that of the TSV at 40 GHz. The insertion loss of TBV (c) is 0.12 dB higher than that of TSV. The c-BN interposer performs better than the silicon interposer in terms of signal integrity, with a similar performance to the glass interposer. The accuracy of the finite element simulation is verified by the RLGC analytical model. The return loss of TBV (c) decreases due to the decrease in the interposer thickness, the increase in spacing between the Cu pillars or the increase in radius of the Cu pillars. Owing to the high thermal conductivity of c-BN, the horizontal and the vertical equivalent thermal conductivity of TBV (c) are approximately 8 times than those of TSV. The heat dissipation performance of TBV (c) is also better than that of TSV. The TBV (c) interposer shows advantages in both electrical and heat transfer aspects, which provide new perspectives for device development in 2.5D integrated packages.</div></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"163 ","pages":"Article 115531"},"PeriodicalIF":1.6000,"publicationDate":"2024-11-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Signal integrity and heat transfer performance of through-boron nitride via\",\"authors\":\"Chao Sun , Chunmin Cheng , Zhaofu Zhang , Gai Wu , Hutao Shi , Zhenyang Lei , Lijie Li , Kang Liang , Wei Shen , Sheng Liu\",\"doi\":\"10.1016/j.microrel.2024.115531\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Silicon interposer is widely used in 2.5D integrated packages due to its good dielectric properties and mature process. However, silicon interposer is not suitable for high-power devices and radio frequency devices, suffering from poor signal integrity and low thermal conduction efficiency. In this work, c-BN is used as an interposer to provide a solution for electrical signal interference and thermal aggregation in the devices. In addition, PTFE, glass and h-BN, w-BN have also been studied for comparison. The finite element simulation results show that the return loss of the TBV (c) is 3.3 dB lower than that of the TSV at 40 GHz. The insertion loss of TBV (c) is 0.12 dB higher than that of TSV. The c-BN interposer performs better than the silicon interposer in terms of signal integrity, with a similar performance to the glass interposer. The accuracy of the finite element simulation is verified by the RLGC analytical model. The return loss of TBV (c) decreases due to the decrease in the interposer thickness, the increase in spacing between the Cu pillars or the increase in radius of the Cu pillars. Owing to the high thermal conductivity of c-BN, the horizontal and the vertical equivalent thermal conductivity of TBV (c) are approximately 8 times than those of TSV. The heat dissipation performance of TBV (c) is also better than that of TSV. The TBV (c) interposer shows advantages in both electrical and heat transfer aspects, which provide new perspectives for device development in 2.5D integrated packages.</div></div>\",\"PeriodicalId\":51131,\"journal\":{\"name\":\"Microelectronics Reliability\",\"volume\":\"163 \",\"pages\":\"Article 115531\"},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2024-11-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronics Reliability\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0026271424002117\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics Reliability","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0026271424002117","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Signal integrity and heat transfer performance of through-boron nitride via
Silicon interposer is widely used in 2.5D integrated packages due to its good dielectric properties and mature process. However, silicon interposer is not suitable for high-power devices and radio frequency devices, suffering from poor signal integrity and low thermal conduction efficiency. In this work, c-BN is used as an interposer to provide a solution for electrical signal interference and thermal aggregation in the devices. In addition, PTFE, glass and h-BN, w-BN have also been studied for comparison. The finite element simulation results show that the return loss of the TBV (c) is 3.3 dB lower than that of the TSV at 40 GHz. The insertion loss of TBV (c) is 0.12 dB higher than that of TSV. The c-BN interposer performs better than the silicon interposer in terms of signal integrity, with a similar performance to the glass interposer. The accuracy of the finite element simulation is verified by the RLGC analytical model. The return loss of TBV (c) decreases due to the decrease in the interposer thickness, the increase in spacing between the Cu pillars or the increase in radius of the Cu pillars. Owing to the high thermal conductivity of c-BN, the horizontal and the vertical equivalent thermal conductivity of TBV (c) are approximately 8 times than those of TSV. The heat dissipation performance of TBV (c) is also better than that of TSV. The TBV (c) interposer shows advantages in both electrical and heat transfer aspects, which provide new perspectives for device development in 2.5D integrated packages.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.