基于 SnO₂ 纳米片的单一 MEMS 传感器用于选择性气体识别

IF 2.9 2区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Electron Devices Pub Date : 2024-10-01 DOI:10.1109/TED.2024.3464573

Wenxin Luo;Jianhao Li;Mingjie Li

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引用次数: 0

摘要

近年来，单一气体传感器选择性差这一难题备受关注。本研究提出了一种简便的方法，可同时分析基于二氧化锡纳米片的气体传感器中的传感器温度变化和电导率变化，从而实现对各种气体（如 H2、NH3 和 CO）的选择性检测。暴露在还原性气体中时，传感器通常会出现温度（热量计读数）和电流（化学电阻读数）的升高，这是气体和表面氧物种之间的放热反应造成的。在单个传感器中对温度升高和电导率变化进行综合评估，为气体识别和浓度测量提供了一种创新策略。

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A Single MEMS Sensor Based on SnO₂ Nanosheets for Selective Gas Identification

In recent years, the challenge of poor selectivity in a single gas sensor has received significant interest. This work presents a facile method for the concurrent analysis of sensor temperature variations and conductivity changes in a SnO2 nanosheets-based gas sensor, enabling the selective detection of various gases (such as H2, NH3, and CO). When exposed to reducing gases, the sensor typically exhibits increases in temperature (calorimetric readout) and current (chemo-resistive readout), resulting from the exothermic reaction between the gases and surface oxygen species. The integrated assessment of temperature elevation and conductivity alterations in a single sensor offers an innovative strategy for gas identification and concentration measurement.

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来源期刊

IEEE Transactions on Electron Devices 工程技术-工程：电子与电气

CiteScore

5.80

自引率

16.10%

发文量

937

审稿时长

3.8 months

期刊介绍： IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.