{"title":"低能量电子辐照对氮化镓纳米二极管射频响应性的影响","authors":"Elsa Pérez-Martín;Ignacio Íñiguez-de-la-Torre;Tomás González;Javier Mateos","doi":"10.1109/TED.2024.3469915","DOIUrl":null,"url":null,"abstract":"Nanodevices are intrinsically strongly influenced by the surrounding environment due to their large surface-to-volume ratio. In this brief, we explore the impact of exposing GaN nanodiodes to a scanning electron microscope (SEM), affecting their dc behavior by reducing the current level, as well as their ac response by modifying the frequency dependence of their voltage responsivity to millimeter waves up to 43.5 GHz. The experiments were performed in a wide range of temperatures from 30 to 300 K. The irreversible changes induced by the low-energy electron irradiation of the SEM beam in the occupation of the traps located at the channel sidewalls, and the accumulation of negative charge within the native oxide filling the trenches, have been found as the responsible of the enhancement of the room temperature responsivity at high frequency and the reduction of the low-frequency dispersion at low temperature.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":"71 11","pages":"7192-7194"},"PeriodicalIF":2.9000,"publicationDate":"2024-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"On the Effect of Low-Energy Electron Irradiation in the RF Responsivity of GaN Nanodiodes\",\"authors\":\"Elsa Pérez-Martín;Ignacio Íñiguez-de-la-Torre;Tomás González;Javier Mateos\",\"doi\":\"10.1109/TED.2024.3469915\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nanodevices are intrinsically strongly influenced by the surrounding environment due to their large surface-to-volume ratio. In this brief, we explore the impact of exposing GaN nanodiodes to a scanning electron microscope (SEM), affecting their dc behavior by reducing the current level, as well as their ac response by modifying the frequency dependence of their voltage responsivity to millimeter waves up to 43.5 GHz. The experiments were performed in a wide range of temperatures from 30 to 300 K. The irreversible changes induced by the low-energy electron irradiation of the SEM beam in the occupation of the traps located at the channel sidewalls, and the accumulation of negative charge within the native oxide filling the trenches, have been found as the responsible of the enhancement of the room temperature responsivity at high frequency and the reduction of the low-frequency dispersion at low temperature.\",\"PeriodicalId\":13092,\"journal\":{\"name\":\"IEEE Transactions on Electron Devices\",\"volume\":\"71 11\",\"pages\":\"7192-7194\"},\"PeriodicalIF\":2.9000,\"publicationDate\":\"2024-10-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Electron Devices\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10711269/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Electron Devices","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10711269/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
由于纳米器件的表面积与体积比很大,因此其本质上会受到周围环境的强烈影响。在本简介中,我们探讨了将氮化镓纳米二极管暴露在扫描电子显微镜(SEM)下的影响,即通过降低电流水平影响其直流行为,以及通过改变其对高达 43.5 GHz 毫米波的电压响应的频率依赖性影响其交流响应。实验是在 30 至 300 K 的宽温度范围内进行的。SEM 光束的低能电子辐照对位于沟道侧壁的陷阱的占用所引起的不可逆变化,以及填充沟道的原生氧化物内负电荷的积累,被认为是室温下高频响应性增强和低温下低频色散减小的原因。
On the Effect of Low-Energy Electron Irradiation in the RF Responsivity of GaN Nanodiodes
Nanodevices are intrinsically strongly influenced by the surrounding environment due to their large surface-to-volume ratio. In this brief, we explore the impact of exposing GaN nanodiodes to a scanning electron microscope (SEM), affecting their dc behavior by reducing the current level, as well as their ac response by modifying the frequency dependence of their voltage responsivity to millimeter waves up to 43.5 GHz. The experiments were performed in a wide range of temperatures from 30 to 300 K. The irreversible changes induced by the low-energy electron irradiation of the SEM beam in the occupation of the traps located at the channel sidewalls, and the accumulation of negative charge within the native oxide filling the trenches, have been found as the responsible of the enhancement of the room temperature responsivity at high frequency and the reduction of the low-frequency dispersion at low temperature.
期刊介绍:
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.